Ultra thin aln piezoelectric nano-actuators

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 469-472

  Sinha, N ^a   Wabiszewski, G E ^a   Mahameed, R ^a   Felmetsger, V V ^b   Tanner, S M ^b   Carpick, R W ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b Tegal Corporation   (United States)

Author keywords

Aln thin film; Aluminum nitride; Nano actuators; NEMS; Piezoelectric film; Stress

Indexed keywords

ALN; ALN FILMS; ALN THIN FILMS; BIMORPH ACTUATION; IN-PLANE STRESS; LOGIC APPLICATIONS; LOW POWER; MATERIAL CHARACTERISTICS; MICRO-SCALES; NANO FILMS; NANO SCALE; NANOACTUATORS; NANOELECTROMECHANICAL SWITCHES; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; PIEZOELECTRIC LAYERS; RELATIVE DIELECTRIC CONSTANT; STRESS GRADIENT; ULTRA-THIN; VERTICAL DEFLECTIONS;

ALUMINUM; ALUMINUM NITRIDE; CANTILEVER BEAMS; MICROSYSTEMS; NANOSENSORS; NITRIDES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; THIN FILM DEVICES; THIN FILMS;

SOLID-STATE SENSORS;

EID: 71449085696     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285460     Document Type: Conference Paper

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