SCOPUS 정보 검색 플랫폼

Volumn 111, Issue 9, 2012, Pages

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-Sc xAl 1-xN thin films

(10) Zukauskaite, Agne a Wingqvist, Gunilla a Palisaitis, Justinas a Jensen, Jens a Persson, Per O A a Matloub, Ramin b Muralt, Paul b Kim, Yunseok c Birch, Jens a Hultman, Lars a

a LINKÖPING UNIVERSITY (Sweden)

b EPFL (Switzerland)

c OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE QUALITY; DIELECTRIC BEHAVIOR; DOUBLE-BEAM; ELECTRODE LAYERS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; EPITAXIALLY GROWN; LOW DIELECTRIC LOSS; PIEZOELECTRIC RESPONSE; PIEZORESPONSE FORCE MICROSCOPY; REACTIVE MAGNETRON CO-SPUTTERING; SUBSTRATE TEMPERATURE; THEORETICAL PREDICTION; WURTZITES;

DEGRADATION; DENSITY FUNCTIONAL THEORY; DIELECTRIC LOSSES; EPITAXIAL GROWTH; PIEZOELECTRICITY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY SPECTROSCOPY; ZINC SULFIDE;

ALUMINUM;

EID: 84864262903 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.4714220 Document Type: Article

Times cited : (113)

References (26)

1
- 84864219977
- M. Reine, P. Lamarre, and A. Hairston, Compound Semicond. 12, 5 (2006).
- (2006) Compound Semicond. , vol.12 , pp. 5
- Reine, M.¹ Lamarre, P.² Hairston, A.³

2
- 67650711664
- 10.1063/1.3155798
- J. Wu, J. Appl. Phys. 106, 1 (2009) 10.1063/1.3155798.
- (2009) J. Appl. Phys. , vol.106 , pp. 1
- Wu, J.¹

3
- 10944266550
- 10.1016/j.surfcoat.2004.04.056
- A. Hörling, L. Hultman, M. Odén, J. Sjölén, and L. Karlsson, Surf. Coat. Technol. 191, 2-3 (2005). 10.1016/j.surfcoat.2004.04. 056
- (2005) Surf. Coat. Technol. , vol.191 , pp. 2-3
- Hörling, A.¹ Hultman, L.² Odén, M.³ Sjölén, J.⁴ Karlsson, L.⁵

4
- 77649272008
- 10.1016/j.scriptamat.2010.01.049
- L. Rogström, L. J. S. Johnson, M. P. Johansson, M. Ahlgren, L. Hultman, and M. Odén, Scr. Mater. 62, 10 (2010). 10.1016/j.scriptamat. 2010.01.049
- (2010) Scr. Mater. , vol.62 , pp. 10
- Rogström, L.¹ Johnson, L.J.S.² Johansson, M.P.³ Ahlgren, M.⁴ Hultman, L.⁵ Odén, M.⁶

5
- 0642275027
- 10.1103/PhysRevB.56.R10024
- F. Bernardini, V. Fiorentini, and D. Vanderbilt, Phys. Rev. B 56, 16 (1997). 10.1103/PhysRevB.56.R10024
- (1997) Phys. Rev. B , vol.56 , pp. 16
- Bernardini, F.¹ Fiorentini, V.² Vanderbilt, D.³

6
- 84864220232
- 10.1002/seu200390006
- R. Aigner, Sens. Update 12, 1 (2003). 10.1002/seup.200390006
- (2003) Sens. Update , vol.12 , pp. 1
- Aigner, R.¹

7
- 60349106915
- 10.1002/adma.200802611
- M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi, and N. Kawahara, Adv. Mater. 21, 5 (2009). 10.1002/adma.200802611
- (2009) Adv. Mater. , vol.21 , pp. 5
- Akiyama, M.¹ Kamohara, T.² Kano, K.³ Teshigahara, A.⁴ Takeuchi, Y.⁵ Kawahara, N.⁶

8
- 77950377426
- 10.1103/PhysRevLett.104.137601
- F. Tasnádi, B. Alling, C. Höglund, G. Wingqvist, J. Birch, L. Hultman, and I. A. Abrikosov, Phys. Rev. Lett. 104, 13 (2010). 10.1103/PhysRevLett.104.137601
- (2010) Phys. Rev. Lett. , vol.104 , pp. 13
- Tasnádi, F.¹ Alling, B.² Höglund, C.³ Wingqvist, G.⁴ Birch, J.⁵ Hultman, L.⁶ Abrikosov, I.A.⁷

9
- 77954179677
- 10.1063/1.3448235
- C. Höglund, J. Birch, B. Alling, J. Bareo, Z. Czigány, P. O. Å. Persson, G. Wingqvist, A. Zukauskaite, and L. Hultman, J. Appl. Phys. 107, 12 (2010). 10.1063/1.3448235
- (2010) J. Appl. Phys. , vol.107 , pp. 12
- Höglund, C.¹ Birch, J.² Alling, B.³ Bareo, J.⁴ Czigány, Z.⁵ Persson, P.O.A.⁶ Wingqvist, G.⁷ Zukauskaite, A.⁸ Hultman, L.⁹

10
- 77956799314
- 10.1063/1.3489939
- G. Wingqvist, F. Tasnádi, A. Zukauskaite, J. Birch, H. Arwin, and L. Hultman, Appl. Phys. Lett. 97, 11 (2010). 10.1063/1.3489939
- (2010) Appl. Phys. Lett. , vol.97 , pp. 11
- Wingqvist, G.¹ Tasnádi, F.² Zukauskaite, A.³ Birch, J.⁴ Arwin, H.⁵ Hultman, L.⁶

11
- 79960188837
- 10.1016/j.vacuum.2011.03.026
- M. Moreira, J. Bjurström, I. Katardjev, and V. Yantchev, Vacuum 86, 1 (2011). 10.1016/j.vacuum.2011.03.026
- (2011) Vacuum , vol.86 , pp. 1
- Moreira, M.¹ Bjurström, J.² Katardjev, I.³ Yantchev, V.⁴

12
- 80052536609
- 10.1063/1.3629773
- R. Matloub, A. Artieda, C. Sandu, E. Milyutin, and P. Muralt, Appl. Phys. Lett. 99, 9 (2011). 10.1063/1.3629773
- (2011) Appl. Phys. Lett. , vol.99 , pp. 9
- Matloub, R.¹ Artieda, A.² Sandu, C.³ Milyutin, E.⁴ Muralt, P.⁵

13
- 70350428097
- 10.1063/1.3251072
- M. Akiyama, K. Kano, and A. Teshigahara, Appl. Phys. Lett. 95, 16 (2009). 10.1063/1.3251072
- (2009) Appl. Phys. Lett. , vol.95 , pp. 16
- Akiyama, M.¹ Kano, K.² Teshigahara, A.³

14
- 0022100534
- 10.1016/0022-5088(85)90066-9
- J. C. Schuster and J. Bauer, J. Less-Common Met. 109, 2 (1985). 10.1016/0022-5088(85)90066-9
- (1985) J. Less-Common Met. , vol.109 , pp. 2
- Schuster, J.C.¹ Bauer, J.²

15
- 67649516599
- 10.1063/1.3132862
- C. Höglund, J. Bareo, J. Birch, B. Alling, Z. Czigány, and L. Hultman, J. Appl. Phys. 105, 11 (2009). 10.1063/1.3132862
- (2009) J. Appl. Phys. , vol.105 , pp. 11
- Höglund, C.¹ Bareo, J.² Birch, J.³ Alling, B.⁴ Czigány, Z.⁵ Hultman, L.⁶

16
- 65849152537
- 10.1016/j.jcrysgro.2009.03.023
- T. Bohnen, G. R. Yazdi, R. Yakimova, G. W. G. van Dreumel, P. R. Hageman, E. Vlieg, R. E. Algra, M. A. Verheijen, and J. H. Edgar, J. Cryst. Growth 311, 11 (2009) 10.1016/j.jcrysgro.2009.03.023.
- (2009) J. Cryst. Growth , vol.311 , pp. 11
- Bohnen, T.¹ Yazdi, G.R.² Yakimova, R.³ Dreumel, G.W.G.V.⁴ Hageman, P.R.⁵ Vlieg, E.⁶ Algra, R.E.⁷ Verheijen, M.A.⁸ Edgar, J.H.⁹

17
- 0000534197
- 10.1063/1.122914
- J. A. Christman, R. R. Woolcott, A. I. Kingon, and R. J. Nemanich, Appl. Phys. Lett. 73, 26 (1998). 10.1063/1.122914
- (1998) Appl. Phys. Lett. , vol.73 , pp. 26
- Christman, J.A.¹ Woolcott, R.R.² Kingon, A.I.³ Nemanich, R.J.⁴

18
- 2942646512
- (Springer, Berlin)
- M. Alexe and A. Gruverman, Nanoscale Characterization of Ferroelectric Materials: Scanning Probe Microscopy Approach (Springer, Berlin, 2004).
- (2004) Nanoscale Characterization of Ferroelectric Materials: Scanning Probe Microscopy Approach
- Alexe, M.¹ Gruverman, A.²

19
- 5244280905
- 10.1063/1.1147000
- A. L. Kholkin, C. Wütchrich, D. V. Taylor, and N. Setter, Rev. Sci. Instrum. 67, 5 (1996). 10.1063/1.1147000
- (1996) Rev. Sci. Instrum. , vol.67 , pp. 5
- Kholkin, A.L.¹ Wütchrich, C.² Taylor, D.V.³ Setter, N.⁴

20
- 77952329869
- 10.1116/1.3359588
- A. Artieda, C. Sandu, and P. Muralt, J. Vac. Sci. Technol. A 28, 3 (2010). 10.1116/1.3359588
- (2010) J. Vac. Sci. Technol. A , vol.28 , pp. 3
- Artieda, A.¹ Sandu, C.² Muralt, P.³

21
- 0025596149
- 10.1016/S0040-6090(05)80026-4
- V. Stambouli, O. Burat, D. Bouchier, F. Meyer, J.-P. Gilles, and G. Gautherin, Thin Solid Films 193-194 (part 1), 181-188 (1990). 10.1016/S0040-6090(05)80026-4
- (1990) Thin Solid Films , vol.193-194 , Issue.PART 1 , pp. 181-188
- Stambouli, V.¹ Burat, O.² Bouchier, D.³ Meyer, F.⁴ Gilles, J.-P.⁵ Gautherin, G.⁶

22
- 0019536965
- 10.1116/1.571463
- D. W. Hoffman and J. A. Thornton, J. Vac. Sci. Technol. 20, 3 (1981). 10.1116/1.571463
- (1981) J. Vac. Sci. Technol. , vol.20 , pp. 3
- Hoffman, D.W.¹ Thornton, J.A.²

23
- 0001471237
- 10.1063/1.1709043
- H. F. Winters and E. Kay, J. Appl. Phys. 38, 10 (1967). 10.1063/1.1709043
- (1967) J. Appl. Phys. , vol.38 , pp. 10
- Winters, H.F.¹ Kay, E.²

24
- 0041743990
- 10.1109/TED.2003.813231
- F. Engelmark, J. Westlinder, G. F. Iriarte, I. V. Katardjiev, and J. Olsson, IEEE Trans. Electron Devices 50, 5 (2003). 10.1109/TED.2003.813231
- (2003) IEEE Trans. Electron Devices , vol.50 , pp. 5
- Engelmark, F.¹ Westlinder, J.² Iriarte, G.F.³ Katardjiev, I.V.⁴ Olsson, J.⁵

25
- 1842427341
- 10.1116/1.1649343
- F. Martin, P. Muralt, M. A. Dubois, and A. Pezous, J. Vac. Sci. Technol. A 22, 2 (2004). 10.1116/1.1649343
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 2
- Martin, F.¹ Muralt, P.² Dubois, M.A.³ Pezous, A.⁴

26
- 47549092153
- 10.1063/1.2957654
- M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, and N. Kawahara, Appl. Phys. Lett. 93, 2 (2008). 10.1063/1.2957654
- (2008) Appl. Phys. Lett. , vol.93 , pp. 2
- Akiyama, M.¹ Kamohara, T.² Kano, K.³ Teshigahara, A.⁴ Kawahara, N.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.