The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

Plasma Sources Science and Technology

Volumn 19, Issue 4, 2010, Pages

  Ziegler, D ^a   Trieschmann, J ^a   Mussenbrock, T ^a   Brinkmann, R P ^a   Schulze, J ^a   Czarnetzki, U ^a   Semmler, E ^a   Awakowicz, P ^a   O'Connell, D ^b   Gans, T ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ASYMMETRIC PHASE; CAPACITIVE DISCHARGES; CAPACITIVELY COUPLED; DC BIAS VOLTAGE; DISSIPATED POWER; DRIVING VOLTAGES; DUAL FREQUENCY; ELECTRON HEATING; ELECTRON PROPAGATION; ENERGETIC ELECTRON; EXCITATION DYNAMICS; EXCITATION EVENTS; GLOBAL MODELS; ION ENERGIES; ION FLUXES; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PLASMA SERIES RESONANCE; POWER DISSIPATION; RADIO FREQUENCIES; RADIO FREQUENCY PLASMA; RELATIVE PHASE; SELF EXCITATION; SIMULATION RESULT;

DC POWER TRANSMISSION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONS; EMISSION SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; PLASMA HEATING; RADIO; RADIO WAVES; RESONANCE; WAVE PLASMA INTERACTIONS;

ELECTRIC DISCHARGES;

EID: 77953748687     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/4/045001     Document Type: Article

References (52)

1. Schneider F 1954 Z. Angew. Math. Phys. 6 456
2. Taillet J 1969 Am. J. Phys. 37 423
3. Godyak V A 1972 Sov. Phys. Tech. Phys. 16 1073
4. Annaratone B M, Ku V P T and Allen J E 1995 J. Appl. Phys. 77 5455
5. Qiu W D, Bowers K J and Birdsall C K 2003 Plasma Sources Sci. Technol. 12 57
6. Klick M 1996 J. Appl. Phys. 79 3445
7. Mussenbrock T, Ziegler D and Brinkmann R P 2006 Phys. Plasmas 13 083501
8. Mussenbrock T and Brinkmann R P 2006 Appl. Phys. Lett. 88 151503
9. Mussenbrock T, Brinkmann R P, Lieberman M A, Lichtenberg A J and Kawamura E 2008 Phys. Rev. Lett. 101 085004
10. Ziegler D, Mussenbrock T and Brinkmann R P 2009 Phys. Plasmas 16 023503
11. Ziegler D, Mussenbrock T and Brinkmann R P 2008 Plasma Sources Sci. Technol. 17 045011
12. Czarnetzki U, Mussenbrock T and Brinkmann R P 2006 Phys. Plasmas 13 123503
13. Franz G and Klick M 2005 J. Vac. Sci. Technol. A 23 917
14. Semmler E, von Keudell A and Awakowicz P 2007 Plasma Sources Sci. Technol. 16 839
15. Yuan Q H, Xin Y, Yin G Q, Huang X J, Sun K and Ning Z Y 2008 J. Phys. D: Appl. Phys. 41 205209
16. Schulze J, Heil B G, Luggenhölscher D and Czarnetzki U 2008 IEEE Trans. Plasma Sci. 36 1400-1
17. Heil B G, Schulze J, Mussenbrock T, Brinkmann R P and Czarnetzki U 2008 IEEE Trans. Plasma Sci. 36 1404-5
18. Schulze J, Heil B G, Luggenhölscher D, Mussenbrock T, Brinkmann R P and Czarnetzki U 2008 J. Phys. D: Appl. Phys. 41 042003
19. Schulze J, Heil B G, Luggenhölscher D, Brinkmann R P and Czarnetzki U 2008 J. Phys. D: Appl. Phys. 41 195212
20. O'Connell D, Gans T, Vender D, Czarnetzki U and Boswell R 2007 Phys. Plasmas 14 034505
21. O'Connell D, Gans T, Semmler E and Awakowicz P 2008 Appl. Phys. Lett. 93 081502
22. Wood B P 1991 PhD Thesis University of California at Berkeley
23. Vender D 1990 PhD Thesis Australian National University
24. Vender D and Boswell R W 1992 J. Vac. Sci. Technol. A 10 1331
25. O'Connell D, Gans T, Meige A, Awakowicz P and Boswell R W 2008 IEEE Trans. Plasma Sci. 36 1382-3
26. Meige A, O'Connell D, Gans T and Boswell R W 2008 IEEE Trans. Plasma Sci. 36 1384-5
27. Donkó Z, Schulze J, Czarnetzki U and Luggenhölscher D 2009 Appl. Phys. Lett. 94 131501
28. Schulze J, Donkó Z, Luggenhölscher D and Czarnetzki U 2009 Plasma Sources Sci. Technol. 18 034011
29. Proschek M, Yin Y, Charles C, Aanesland A, McKenzie D R, Bilek M M and Boswell R W 2005 Plasma Sources Sci. Technol. 14 407-11
30. Boyle P C, Ellingboe A R and Turner M M 2004 Plasma Sources Sci. Technol. 13 493
31. Boyle P C, Ellingboe A R and Turner M M 2004 J. Phys. D: Appl. Phys. 37 697
32. Kitajima T, Takeo Y, Petrovic Z L and Makabe T 2000 Appl. Phys. Lett. 77 489
33. Denda T, Miyoshi Y, Komukai Y, Goto T, Petrovic Z L and Makabe T 2004 J. Appl. Phys. 95 870
34. Lee J K, Manuilenko O V, Babaeva N Yu, Kim H C and Shon J W 2005 Plasma Sources Sci. Technol. 14 89
35. Gans T, Schulze J, O'Connell D, Czarnetzki U, Faulkner R, Ellingboe A R and Turner M M 2006 Appl. Phys. Lett. 89 261502
36. Schulze J, Gans T, O'Connell D, Czarnetzki U, Ellingboe A R and Turner M M 2007 J. Phys. D: Appl. Phys. 40 7008
37. Kawamura E, Lieberman M A and Lichtenberg A J 2006 Phys. Plasmas 13 053506
38. Turner M M and Chabert P 2006 Phys. Rev. Lett. 96 205001
39. Donkó Z and Petrovic Z L 2006a Japan. J. Appl. Phys. Part 1 45 8151
40. Heil B G, Czarnetzki U, Brinkmann R P and Mussenbrock T 2008 J. Phys. D: Appl. Phys. 41 165202
41. Czarnetzki U, Heil B G, Schulze J, Donkó Z, Mussenbrock T and Brinkmann R P 2009 IOP Conf. Ser. 162 012010
42. Donkó Z, Schulze J, Heil B G and Czarnetzki U 2009 J. Phys. D: Appl. Phys. 42 025205
43. Schulze J, Schüngel E, Donkó Z and Czarnetzki U 2009 J. Phys. D: Appl. Phys. FTC 42 092005
44. Longo S and Diomede P 2009 Plasma Process. Polym. 6 370
45. Mussenbrock T and Brinkmann R P 2007 Plasma Sources Sci. Technol. 16 377
46. Mussenbrock T, Hemke T, Ziegler D, Brinkmann R P and Klick M 2008 Plasma Sources Sci. Technol. 17 025018
47. Lieberman M A, Lichtenberg A J, Kawamura E, Mussenbrock T and Brinkmann R P 2008 Phys. Plasmas 15 063505
48. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing 2nd edn (New York: Wiley)
49. Metze A, Ernie D W and Oskam H J 1986 J. Appl. Phys. 60 3081
50. Raizer Yu P 1997 Gas Discharge Physics 2nd edn (Berlin: Springer)
51. Schulze J, Donkó Z, Heil B G, Luggenhölscher D, Mussenbrock T, Brinkmann R P and Czarnetzki U 2008 J. Phys. D: Appl. Phys. 41 105214
52. Sato A H and Lieberman M A 1990 J. Appl. Phys. 68 6117