Plasma ionization in low-pressure radio-frequency discharges - Part I: Optical measurements

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1382-1383

  O'Connell, Deborah ^a,b   Gans, Timo ^a   Meige, Albert ^c   Awakowicz, Peter ^b   Boswell, Rod W ^d  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c ECOLE POLYTECHNIQUE   (France)

^d AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Capacitively coupled plasmas; Discharges; Electric field reversal; Electric fields; Electrodes; Heating; Ionization; Phase resolved optical emission spectroscopy; Plasma diagnostics; Plasma ionization; Plasmas; Radio frequency; Radio frequency plasmas; Wave particle interaction

Indexed keywords

ATOMIC SPECTROSCOPY; ATOMS; CHLORINE COMPOUNDS; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTRONS; EMISSION SPECTROSCOPY; FLOW INTERACTIONS; INDUCTIVELY COUPLED PLASMA; INERT GASES; INTEGRATED OPTOELECTRONICS; IONIZATION; MOLECULAR SPECTROSCOPY; NEON; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; PLASMA SHEATHS; PLASMAS;

BULK PLASMA; CAPACITIVELY COUPLED PLASMA; CAPACITIVELY COUPLED PLASMAS; DISCHARGES; ELECTRIC FIELD REVERSAL; ELECTRODES; ELECTRON DYNAMICS; HEATING; OPERATION REGIMES; OPTICAL MEASUREMENTS; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PLASMA IONIZATION; PLASMA SCIENCE; RADIO FREQUENCY; RADIO-FREQUENCY DISCHARGES; RADIO-FREQUENCY PLASMAS; TWO-STREAM INSTABILITY; WAVE-PARTICLE INTERACTION; WAVE-PARTICLE INTERACTIONS;

PLASMA STABILITY;

EID: 50249141305     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.927348     Document Type: Article

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