The effect of phase difference between powered electrodes on RF plasmas

Plasma Sources Science and Technology

Volumn 14, Issue 3, 2005, Pages 407-411

  Proschek, M ^a   Yin, Y ^a   Charles, C ^b   Aanesland, A ^b   McKenzie, D R ^a   Bilek, M M ^a   Boswell, R W ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FREQUENCIES; GEOMETRY; PHASE SHIFT; SYNCHRONIZATION;

PHASE DIFFERENCE; PHASE-SHIFT CONTROLLERS; RF DISCHARGE SYSTEMS; RF-CYCLE;

PLASMAS;

EID: 23844452327     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/3/001     Document Type: Article

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