Electron heating in capacitively coupled discharges and reactive gases

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 917-921

  Franz, Gerhard ^a   Klick, Michael ^b  

^a MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b Advanced Semiconductor Instruments   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CAPACITANCE; ELECTRIC DISCHARGES; ELECTRON TRANSITIONS; NATURAL FREQUENCIES; RANDOM PROCESSES;

ELECTRON HEATING; OHMIC HEATING; SELF-EXCITED ELECTRON RESONANCE SPECTROSCOPY;

ELECTRIC HEATING;

EID: 31044432354     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1947201     Document Type: Conference Paper

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