Electron beams in capacitively coupled radio-frequency discharges

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 1400-1401

  Schulze, Julian ^a   Heil, Brian G ^a   Luggenhölscher, Dirk ^a   Czarnetzki, Uwe ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Capacitively coupled RF discharges; Electron beams; Phase resolved optical emission spectroscopy; Plasma series resonance; Stochastic heating

Indexed keywords

ATOMIC SPECTROSCOPY; BOUNDARY CONDITIONS; DISCHARGE (FLUID MECHANICS); ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; EMISSION SPECTROSCOPY; FLUID MECHANICS; HEATING; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; PARTICLE BEAMS; PLASMA DIAGNOSTICS; PLASMAS;

CAPACITIVELY COUPLED; CAPACITIVELY COUPLED RF DISCHARGES; DISCHARGE GEOMETRY; ENERGETIC ELECTRONS; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PLASMA BOUNDARY; PLASMA SCIENCE; PLASMA SERIES RESONANCE; RADIO-FREQUENCY DISCHARGES; RESONANCE EFFECTS; SINGLE-FREQUENCY; STOCHASTIC HEATING;

ELECTRIC DISCHARGES;

EID: 50249181297     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.924404     Document Type: Article

References (5)

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3. D. O'Connell, T. Gans, D. Vender, U. Czarnetzki, and R. W. Boswell, "Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge," Phys. Plasmas, vol. 14, no. 3, p. 034 505, Mar. 2007.
4. D. Vender and R. W. Boswell, "Electron-sheath interaction in capacitive radio-frequency plasmas," J. Vac. Sci. Technol. A, Vac. Surf. Films vol. 10, no. 4, pp. 1331-1338, Jul. 1992.
5. B. P. Wood, "Sheath heating in low pressure capacitive radio frequency discharges," Ph.D. dissertation, Univ. Berkeley, Berkeley, CA, 1991.