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Volumn 12, Issue 1, 2003, Pages 57-68

Electron series resonant discharges: Comparison between simulation and experiment

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC RESISTANCE; ELECTRON RESONANCE; HYSTERESIS; ION BOMBARDMENT; MONTE CARLO METHODS; PARAMAGNETIC RESONANCE; PLASMA DENSITY; PLASMA DIODES; PLASMA SHEATHS; PLASMAS;

EID: 0037294777     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/1/308     Document Type: Article
Times cited : (37)

References (20)
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  • 4
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    • Resonance oscillations in a hot nonuniform plasma
    • Parker J V, Nickel J C and Gould R W 1964 Resonance oscillations in a hot nonuniform plasma Phys. Fluids 7 1489
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    • Parker, J.V.1    Nickel, J.C.2    Gould, R.W.3
  • 5
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    • Steady state low pressure RF discharges
    • Godyak V A 1976 Steady state low pressure RF discharges Sov. J. Plasma Phys. 2 78
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    • Godyak, V.A.1
  • 7
    • 0014491846 scopus 로고
    • Resonance-sustained radio frequency discharges
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    • Taillet, J.1
  • 8
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    • Electron series resonant discharges: Part II: Simulations of initiation
    • submitted
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    • (2003) Plasma Sources Sci. Technol.
    • Bowers, K.J.1    Qiu, W.D.2    Birdsall, C.K.3
  • 9
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    • Private communication
    • Smith H 2000 Private communication
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    • Smith, H.1
  • 11
    • 0031177530 scopus 로고    scopus 로고
    • Mode jumps and hysteresis in surface-wave sustained microwave discharges
    • Ghanashev I, Nagatsu M, Xu G and Sugai H 1997 Mode jumps and hysteresis in surface-wave sustained microwave discharges Japan. J. Appl. Phys. 36 4704-10
    • (1997) Japan. J. Appl. Phys. , vol.36 , pp. 4704-4710
    • Ghanashev, I.1    Nagatsu, M.2    Xu, G.3    Sugai, H.4
  • 12
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    • Double-valued behavior of the parameters of an RF discharge as functions of the burning voltage
    • Godyak V A and Popov O A 1977 Double-valued behavior of the parameters of an RF discharge as functions of the burning voltage Sov. J. Plasma Phys. 3 418-19
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.