Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

Physics of Plasmas

Volumn 14, Issue 3, 2007, Pages

  O'Connell, D ^a   Gans, T ^a,d   Vender, D ^b   Czarnetzki, U ^a   Boswell, R ^c  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b Port Arthur   (Australia)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^d QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRON BEAMS; OPTICAL EMISSION SPECTROSCOPY; PLASMA SOURCES; PLASMA WAVES;

HIGH TEMPORAL RESOLUTION; PLASMA IONIZATION; RADIO FREQUENCY DISCHARGES; WAVE PARTICLE INTERACTION;

IONIZATION;

EID: 34047133300     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2717889     Document Type: Article

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