A review of silicon carbide development in MEMS applications

International Journal of Computational Materials Science and Surface Engineering

Volumn 2, Issue 3-4, 2009, Pages 227-242

  Jiang, Liudi ^a   Cheung, Rebecca ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

Deposition; Devices; Fabrication; MEMS; Microelectromechanical systems; Prospect; Review; SiC; Silicon carbide

Indexed keywords

COST EFFECTIVENESS; DEPOSITION; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; REVIEWS;

ALTERNATIVE MATERIALS; CARBIDE DEVELOPMENT; DEVICES; FABRICATION PROCESS; MATERIAL DEPOSITION; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PROSPECT; SILICON CARBIDES (SIC);

SILICON CARBIDE;

EID: 68849112428     PISSN: 17533465     EISSN: 17533473     Source Type: Journal    
DOI: 10.1504/IJCMSSE.2009.027484     Document Type: Review

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