Formation of SiC SOI structures by direct growth on insulating layers

Journal of the Electrochemical Society

Volumn 147, Issue 10, 2000, Pages 3840-3844

  Chen, J ^a   Scofield, J ^b   Steckl, A J ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744740194     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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