Micro/nanotribological studies of poly silicon and SiC films for MEMS applications

Wear

Volumn 217, Issue 2, 1998, Pages 251-261

  Sundararajan, Sriram ^a   Bhushan, Bharal ^a  

^a The Ohio State University   (United States)

Author keywords

Atomic force microscopy (AFM); Microelectromechanical systems (MEMS): Micro nanotribology; Pulysilicon films; Silicon carbide films

Indexed keywords

ELASTIC MODULI; FRICTION; HARDNESS; MICROELECTROMECHANICAL DEVICES; PLASTIC FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SILICON CARBIDE; SINGLE CRYSTALS; SURFACE ROUGHNESS; TRIBOLOGY; WEAR RESISTANCE;

FRICTION FORCE MICROSCOPY (FFM); MICRO/NANOTRIBOLOGY; POLYSILICON;

SEMICONDUCTING FILMS;

FILM; SILICON CARBIDE; TRIBOLOGY;

EID: 0032523974     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(98)00169-0     Document Type: Article

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