Development and evolution of MOEMS technology in variable optical attenuators

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 2, 2008, Pages

  Lee, Chengkuo ^a,b   Yeh, J Andrew ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Actuators; Micro optoelectromechanical systems; Microelectromechanical systems; Variable optical attenuators

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTRIC ATTENUATORS; ELECTROMAGNETIC WAVE ATTENUATION; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; TECHNOLOGY;

ENABLING TECHNOLOGIES; FABRICATION PROCESS; LITERATURE SURVEY; MEMS VOA; MICRO ELECTRO MECHANICAL SYSTEM; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; OPTICAL COMMUNICATION TECHNOLOGIES; OPTICAL MICROELECTROMECHANICAL SYSTEM; OPTICAL NETWORKING; RESEARCH ACTIVITIES; STEP-BY-STEP; VARIABLE OPTICAL ATTENUATORS;

MOEMS;

EID: 58949085730     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2949816     Document Type: Article

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