A silicon MEMS optical switch attenuator and its use in lightwave subsystems

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 18-25

  Giles, C R ^a   Aksyuk, V ^a   Barber, B ^a   Ruel, R ^a   Stulz, L ^a   Bishop, D ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

Fiber optics communications; Lightwave systems; Mems devices; Micromachines; Optical networks; Optical switches

Indexed keywords

ARRAYS; COMMUNICATION CHANNELS (INFORMATION THEORY); FIBER OPTIC NETWORKS; INSERTION LOSSES; LIGHT REFLECTION; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MULTIPLEXING EQUIPMENT; OPTICAL COMMUNICATION; OPTICAL SWITCHES; SILICON; WAVELENGTH DIVISION MULTIPLEXING;

LIGHTWAVE SYSTEMS;

ELECTRIC ATTENUATORS;

EID: 0032672606     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748100     Document Type: Article

References (18)

1. "Micromechanics and MEMS," Classic and Seminal Papers to 1990, W. S Trimmer, Ed. Piscataway, NJ: IEEE, 1997.
2. P. Rai-Choudhury, Ed., Handbook of Microlithography, Micromachining and Microfabrication. Washington, DC: SPIE Optical Engineering Press, 1997.
3. M. Wu, "Micromachining for optical and optoelectronic systems," Proc. IEEE, vol. 85, pp. 1833-1856, Nov. 1997.
4. L. J. Hornbeck, "Current status of the digital micromirror device (DMD) for projection television applications," Int. Electron Devices Tech. Dig., 1993, pp. 381-384.
5. K. Goosen, J. A. Walker, and S. C. Arney, "Silicon modulator based on mechanical-active anti-reflection layer with 1 Mb/s capability for fiber-in-the-loop applications," IEEE Photon. Technol. Lett., 1994, pp. 1119-1121.
6. Y. Hashimoto, K. Uenishi, and S. Nagoaka, "Micro-optical gate for fiber optic communication," Transducers '97, IEEE Int. Conf. Solid-State Sensors and Actuators, 1997, pp. 331-334.
7. J. Ford, J. A. Walker, and K. W. Goossen, "Fiber-coupled variable attenuator using a MARS modulator," in SPIE Proc., Microstructures and MEMS for Optical Processing III, vol. 3226, pp. 86-93, 1997.
8. R. Giles, V. Aksyuk, B. Barber, A. Dentai, E. Burrows, C. Burrus, L. Stulz, J. Hoffman, and B. Moyer, "Highly efficient light-actuated micromechanical photonic switch for enhanced functionality at remote nodes," presented at the Optical Fiber Conf., San Jose, CA, 1998, paper PD2.
9. A. G. Dentai, E. C. Burrows, C. R. Giles, C. A. Burrus, and J. C. Centanni, "High-voltage (2.1 V) integrated InGaAs photogenerator," Electron. Lett., vol. 33, no. 8, pp. 718-719, 1997.
10. L. Y. Lin, E. L. Goldstein, J. M. Simmons, and R. W. Tkach, "High-density connection-symmetric free-space micromachine polygon optical crossconnects with low loss for WDM networks," presented at the Optical Fiber Conf., San Jose, CA, 1998, paper PD24.
11. Okamoto, K. Takiguchi, and Y. Ohmori, "16-channel optical add/drop multiplexer using silica based arrayed-waveguide gratings," Electron. Lett., vol. 31, no. 9, pp. 723-724, 1995.
12. Vreeburg, T. Uitterdijk, Y. S. Oei, M. K. Smit, F. H. Groen, E. G. Metaal, P. Demeester, and H. J. Frankena, "First InP-based reconfigurable integrated add-drop multiplexer," IEEE Photon. Tech. Lett., vol. 9, pp. 188-190, Feb. 1997.
13. J. E. Ford, J. A. Walker, V. Aksyuk, and D. J. Bishop, "Wavelength-selectable add/drop with tilting micromirrors," presented at the LEOS Annu. Meeting, Nov. 1997, postdeadline paper PD 2.3.
14. V. Asksyuk, B. Barber, C. R. Giles, R. Ruel, L. Stulz, and D. Bishop, "Low insertion loss packaged and fiber-connectorized Si surface-micromachined reflective optical switch," in Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8-11, 1998, pp. 79-82.
15. V. Askyuk, C. R. Giles, B. Barber, R. Ruel, L. Stulz, and D. Bishop, "Low insertion loss packaged and fiber-connectorized MEMS reflective optical switch," Electron. Lett., to be published.
16. M. Born and E. Wolf, Principles of Optics, 5th ed. Oxford, U.K.: Pergamon, 1975, pp. 380-381.
17. H. Kogelnik, "Coupling and conversion coefficients for optical modes," Proc. Symp. Quasi-Optics, 1964, vol. 14, pp. 333-347.
18. C. Dragone, "An N × N optical multiplexer using a planar arrangement of two star couplers," IEEE Photon. Technol. Lett., vol. 3, pp. 812-815, 1991.