Optical MEMS for telecoms

Materials Today

Volumn 5, Issue 7-8, 2002, Pages 26-35

  Syms, Richard R A ^a   Moore, David F ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; COST EFFECTIVENESS; ELECTRONICS PACKAGING; ELECTROPLATING; GUIDED ELECTROMAGNETIC WAVE PROPAGATION; MATERIALS SCIENCE; OPTICAL SYSTEMS; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY; TELECOMMUNICATION NETWORKS;

FUNCTIONAL OPTICAL DEVICES; GUIDED WAVE OPTICAL SYSTEMS; MICROOPTOELECTROMECHANICAL (MOEMS) SYSTEMS; OPTOELECTRONICS PACKAGING;

MICROELECTROMECHANICAL DEVICES;

EID: 0038817528     PISSN: 13697021     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-7021(02)00839-8     Document Type: Review

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