Fabrication and measurement of low-stress polyimide membrane for high-resolution variable optical attenuator

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 13, Issue 2, 2007, Pages 312-315

  Su, Guo Dung J ^a,b   Yeh, Yu Wei ^b   Chiu, Chen Wei E ^b   Li, Chao Hu ^b   Chen, Tyng Yow ^b  

^a IEEE   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Large stroke; Low stress; Polyimide; Variable optical attenuator (VOA)

Indexed keywords

DYNAMIC RANGE; OPTICAL POWER; POLYIMIDE MEMBRANE; VARIABLE OPTICAL ATTENUATOR (VOA);

ELASTIC MODULI; ELECTROSTATIC FORCE; INSERTION LOSSES; OPTICAL COLLIMATORS; POLYIMIDES; THREE DIMENSIONAL;

WAVEGUIDE ATTENUATORS;

EID: 34247524260     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.893270     Document Type: Article

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