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Volumn 124, Issue 6, 2004, Pages 213-218

MEMS Variable Optical Attenuator using Asymmetricaly Driven Parallel Plate Tilt Mirror

Author keywords

electrostatic actuator; micromachining; variable optical attenuator

Indexed keywords


EID: 80052407338     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.124.213     Document Type: Article
Times cited : (3)

References (8)
  • 2
    • 0032118893 scopus 로고    scopus 로고
    • Low insertion loss package andlibre connectorised MEMS reflective optical switch
    • V. Aksyuk, B. Barber, C. R. Giles, R. Ruel, L. Stulz, and D. Bishop : “Low insertion loss package andlibre connectorised MEMS reflective optical switch”, Electronics Lett, Vol. 34, No. 14, pp. 1413-1414 (1998)
    • (1998) Electronics Lett , vol.34 , pp. 1413-1414
    • Aksyuk, V.1    Barber, B.2    Giles, C.R.3    Ruel, R.4    Stulz, L.5    Bishop, D.6
  • 3
    • 84944744617 scopus 로고    scopus 로고
    • Electromagnetic Variable Optical Attenuator
    • IEEE/LEOS Int. Conf. on Optical MEMS, 23 Aug. Lugano, Swiss
    • C.-H. Ji, Y. Yee, J. Choi, and J.-U. Bu : “Electromagnetic Variable Optical Attenuator”, 2002 IEEE/LEOS Int. Conf. on Optical MEMS, 20 - 23 Aug. 2002, Lugano, Swiss, pp. 49-50
    • (2002) , vol.20 , pp. 49-50
    • Ji, C.-H.1    Yee, Y.2    Choi, J.3    Bu, J.-U.4
  • 4
    • 1442309360 scopus 로고    scopus 로고
    • Optical characteristics of a micromachined VOA using successive partial transmission in a silicon optical leaker
    • IEEE/LEOS Int. Conf. On Optical MEMS, 20-23 Aug.
    • S.-S. Yun, Y.-Y. Kim, H.-N. Kown, W.-H. Kim, J.-H. Lee, Y.-G. Lee, and S.-C. Jung : “Optical characteristics of a micromachined VOA using successive partial transmission in a silicon optical leaker”, 2002 IEEE/LEOS Int. Conf. On Optical MEMS, 20-23 Aug. 2002, Lugano, Swiss, pp. 51-52
    • (2002) Lugano, Swiss , pp. 51-52
    • Yun, S.-S.1    Kim, Y.-Y.2    Kown, H.-N.3    Kim, W.-H.4    Lee, J.-H.5    Lee, Y.-G.6
  • 5
    • 84963723364 scopus 로고    scopus 로고
    • MEMS Reflective Type Variable Optical Attenuator Using Off-Axis Misalignment
    • IEEE/LEOS Int. Conf. on Optical MEMS, 23 Aug. 2002, Lugano, Swiss
    • C.-H. Kim, N. Park, and Y.-K. Kim : “MEMS Reflective Type Variable Optical Attenuator Using Off-Axis Misalignment”, 2002 IEEE/LEOS Int. Conf. on Optical MEMS, 20 - 23 Aug. 2002, Lugano, Swiss, pp. 55-56
    • (2002) , vol.20 , pp. 55-56
    • Kim, C.-H.1    Park, N.2    Kim, Y.-K.3
  • 7
    • 0032187910 scopus 로고    scopus 로고
    • Dynamic S pectral Power Equalization Using Micro-Opto-Mechanics
    • J. E. Ford and J. A. Walker : “Dynamic S pectral Power Equalization Using Micro-Opto-Mechanics”, IEEE Photon. Tech. Lett., Vol. 10, pp. 1440-1442 (1998)
    • (1998) IEEE Photon. Tech. Lett. , vol.10 , pp. 1440-1442
    • Ford, J.E.1    Walker, J.A.2
  • 8
    • 0035368876 scopus 로고    scopus 로고
    • Linearization of Electrostatically Actuated Surface Micromachined 2D Optical Scanner
    • June
    • H. Tbshiyoshi, W. Piyawattanametha, C.-T. Chan, and M. C. Wu : “Linearization of Electrostatically Actuated Surface Micromachined 2D Optical Scanner”, IEEE/ASME J. Microelectromech. Syst. Vol. 10, pp. 205-214, June, 2001
    • (2001) IEEE/ASME J. Microelectromech. Syst. , vol.10 , pp. 205-214
    • Tbshiyoshi, H.1    Piyawattanametha, W.2    Chan, C.-T.3    Wu, M.C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.