High-power optical micro switch fabricated by deep reactive ion etching (DRIE)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 75-86

  Cochran, Kevin R ^a,b   Fan, Lawrence ^b   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

Comb drive; DRIE; Micro optical switch; MOEMS; S A; Thermal actuator

Indexed keywords

ACTUATORS; OPTICAL FIBERS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY;

MICRO SWITCHES;

OPTICAL SWITCHES;

EID: 0037721159     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477927     Document Type: Conference Paper

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