Feasibility study of self-assembly mechanism for variable optical attenuator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 55-62

  Lee, Chengkuo ^a   Lai, Yen Jyh ^a   Wu, Chia Yu ^a   Yeh, J Andrew ^b   Huang, Ruey Shing ^b  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATTENUATION EQUALIZERS; MICROMACHINING; POLYSILICON; RESIDUAL STRESSES; SELF ASSEMBLY; SURFACES; VOLTAGE MEASUREMENT;

OPTICAL ATTENUATION; POLYSILICON BEAM ACTUATOR; SURFACE MICROMACHINING; VARIABLE OPTICAL ATTENUATOR (VOA);

ELECTRIC ATTENUATORS;

EID: 12444343091     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/009     Document Type: Article

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