Mechanical stability of a latching MEMS variable optical attenuator

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 529-538

  Syms, Richard R A ^a   Zou, H ^a   Boyle, P ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Microelectromechanical systems (MEMS); Microoptoelectromechanical systems (MOEMS); Variable optical attenuator (VOA); Vibration testing

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; NATURAL FREQUENCIES; NUMERICAL ANALYSIS; OPTICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; REACTIVE ION ETCHING; RESONANCE; SILICON ON INSULATOR TECHNOLOGY; STABILITY; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); VARIABLE OPTICAL ATTENUATOR (VOA); VIBRATION TESTING;

MICROELECTROMECHANICAL DEVICES;

EID: 22444449285     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844764     Document Type: Article

References (27)

1. J. A. Walker, "The future of MEMS in telecommunications networks," J. Micromech. Microeng., vol. 10, pp. R1-R7, 2000.
2. B. Barber, C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop, "A fiber connectorized MEMS variable optical attenuator," IEEE Photon. Technol. Lett., vol. 10, pp. 1262-1264, 1998.
3. C. Marxer, P. Griss, and N. F. de Rooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photon. Technol Lett., vol. 11, pp. 233-235, 1999.
4. C.-H. Ji, Y. Yee, J. Choi, and J.-U. Bu, "Electromagnetic variable optical attenuator," in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, Lugano, Switzerland, Aug. 20-23, 2002, pp. 49-50.
5. S. Kim, "Novel MEMS variable optical attenuator with expanded core waveguides," in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, Lugano, Switzerland, Aug. 20-23, 2002, pp. 65-66.
6. R. Wood, V. R. Dhuler, and E. A. Hill, "A MEMS variable attenuator," in Proc. IEEE/LEOS Int. Conf on Optical MEMS, Kauai, HI, Aug. 21-24, 2000, pp. 121-122.
7. J. H. Lee, Y. Y. Kim, S. S. Yun, H. Kwon, Y. S. Hong, J. H. Lee, and S. C. Jung, "Design and characteristics of a micromachined variable optical attenuator with a silicon optical wedge," Opt. Commun., vol. 221, pp. 323-330, 2003.
8. C.-H. Kim, N. Park, and Y.-K. Kim, "Development and characterization of MEMS reflective type variable optical attenuator using off-axis misalignment," in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, Lugano, Switzerland, Aug. 20-23, 2002, pp. 55-56.
9. S. Sumriddetchkajorn and N. A. Riza, "Fault-tolerant three-port fiberoptic attenuator using small tilt micromirror device," Opt. Commun., vol. 205, pp. 77-86, 2002.
10. V. R. Dhuler and E. A. Hill, "Microelectromechanical Devices Having Brake Assemblies Therein to Control Movement of Optical Shutters and Other Movable Elements," European Patent EP1 139 141, Oct. 4, 2001.
11. R. R. A. Syms, H. Zou, J. Stagg, and D. F. Moore, "Multi-state latching MEMS variable optical attenuator," IEEE Photon. Technol. Lett., vol. 16, pp. 191-193, 2004.
12. R. R. A. Syms, H. Zou, J. Stagg, and D. F. Moore, "MEMS variable optical attenuator with a compound latch," in Micro- and Nano-Engineering 2003, Cambridge, U.K., Sep. 22-25, 2003, MS-05.
13. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, vol. 86, pp. 1640-1658, 1998.
14. G. X. Li and A. A. Tseng, "Transient and impact dynamics of a micro-accelerometer," in J. Mat. Proc. Manufact. Sci., vol. 9, 2000, pp. 143-155.
15. A. Bosseboeuf and S. Petitgrand, "Characterization of the static and dynamic behavior of M(O)EMS by optical techniques: Status and trends," J. Micromech. Microeng., vol. 13, pp. S23-S33, 2003.
16. D. J. Burns and H. F. Helbig, "A system for automatic electrical and optical characterization of microelectromechanical devices," J. Microelectromech. Syst., vol. 8, pp. 473-482, 1999.
17. A. Prak, M. Elwenspoek, and J. H. J. Fluitman, "Selective mode excitation and detection of micromachined resonators," J. Microelectromech. Syst., vol. 1, pp. 179-186, 1992.
18. J. S. Burdess, A. J. Harris, D. Wood, R. J. Pitcher, and D. Glennie, "A system for the dynamic characterization of microstructures," J. Microelectromech. Syst., vol. 6, pp. 322-328, 1997.
19. H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon, and E. G. Lovell, "Thermo-magnetic metal flexure actuators," in Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Jun. 22-25, 1992, pp. 73-75.
20. C. S. Pan and W. Hsu, "An electro-thermally and laterally driven polysilicon microactuator" J. Micromech. Microeng., vol. 7, pp. 7-13, 1997.
21. A. M. Hynes, H. Ashraf, J. K. Bhardwaj, J. Hopkins, I. Johnston, and J. N. Shepherd, "Recent advances in silicon etching for MEMS using the ASE™ process," Sens. Actuators, vol. 74, pp. 13-17, 1999.
22. W. T. Thomson, Theory of Vibration with Applications, 4th ed. London, U.K.: Chapman and Hall, 1993.
23. T. S. Lammerink, M. Elwenspoek, and J. H. J. Fluitman, "Frequency dependence of thermal excitation of micromechanical resonators," Sens. Actuators A - Phys., vol. A25-27, pp. 685-689, 1991.
24. Y.-H. Cho, B. M. Kwak, A. P. Pisano, and R. T Howe, "Slide film damping in laterally driven microstructures," Sens. Actuators A-Phys., vol. A40, pp. 31-39, 1994.
25. R. R. A. Syms, "Long-travel electrothermally-driven resonant cantilever microactuators," J. Micromech. Microeng., vol. 12, pp. 211-218, 2002.
26. L. Nicu and C. Bergaud, "Experimental and theoretical investigations on nonlinear resonances of composite buckled microbridges," J. Appl. Phys., vol. 86, pp. 5835-5840, 1999.
27. C. Gui, R. Legtenberg, H. A. C. Tilmans, J. H. J. Fluitman, and M. Elwenspoek, "Nonlinearity and hysteresis of resonant strain gauges," J. Microelectromech. Syst., vol. 7, pp. 122-127, 1998.