MEMS optical switches

IEEE Communications Magazine

Volumn 39, Issue 11, 2001, Pages 158-163

  Yeow, T W ^a   Eddie, K L ^a   Goldenberg, A ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTOELECTRONICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL INTERCONNECTS; OPTICS; SILICON WAFERS;

BULK MICROMACHINING; OPTICAL ADD DROP MULTIPLEXER; OPTICAL CROSSCONNECT SWITCHES; SURFACE MICROMACHINING;

OPTICAL SWITCHES;

EID: 0035507574     PISSN: 01636804     EISSN: None     Source Type: Journal    
DOI: 10.1109/35.965375     Document Type: Article

References (7)

1. Silicon as a mechanical material
2. Lucent microstar micromirror array technology for large optical crossconnects
3. Electrostatic micro torsion mirrors for an optical switch matrix
4. An electromagnetic MEMS 2×2 fiber optic bypass switch
5. Integrated signal monitoring and connection verification in MEMS optical crossconnects
6. Microfabricated hinges
7. A quantitative analysis of scratch drive actuator using buckling motion