Micromachined electromagnetic variable optical attenuator for optical power equalization

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 4, 2005, Pages

  Dai, Xuhan ^a   Zhao, Xiaolin ^a   Ding, Guifu ^a   Cai, Bingchu ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

Electromagnetic; Moems; Power equalization; Variable optical attenuator

Indexed keywords

INSERTION LOSSES; LIGHT POLARIZATION; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICES; SINGLE MODE FIBERS; WAVEGUIDE ATTENUATORS;

POWER EQUALIZATION; SEMICONDUCTOR TECHNOLOGIES; VARIABLE OPTICAL ATTENUATORS;

OPTICAL DEVICES;

EID: 33747587224     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2120648     Document Type: Article

References (5)

1. S. Cohen, "Novel VOAs provide more speed and utility," Laser Focus World 36(11), 139-146 (2000).
2. B. Barber, C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop, "A fiber connectorized MEMS variable optical attenuator," IEEE Photonics Technol. Lett. 10(9), 1262-1264 (1998).
3. J. E. Ford, J. A. Walker, and K. W. Goossen, "Fiber-coupled variable attenuator using a MARS modulator," Proc. SPIE 3226, 86-93 (1997).
4. C. Marxer, P. Griss, and N. F. de Rooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photonics Technol. Lett. 11(2), 233-235 (1999).
5. H. Kogelnik, "Coupling and conversion coefficients for optical modes," Proc. Symp. Quasi-Optics 14, 333-347 (1964).