메뉴 건너뛰기




Volumn 39, Issue 1, 2001, Pages 62-69

MEMS technology for optical networking applications

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL INTERCONNECTS; OPTICAL SWITCHES; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; WAVEGUIDE ATTENUATORS;

EID: 0035101710     PISSN: 01636804     EISSN: None     Source Type: Journal    
DOI: 10.1109/35.894378     Document Type: Article
Times cited : (158)

References (15)
  • 1
    • 0020127035 scopus 로고
    • Silicon as a mechanical material
    • K. Petersen, "Silicon as a Mechanical Material," Proc. IEEE, vol. 70, no. 5, 1982, pp. 420.
    • (1982) Proc. IEEE , vol.70 , Issue.5 , pp. 420
    • Petersen, K.1
  • 2
    • 0003387309 scopus 로고
    • Fiberoptic switching and multiplexing with a micromechanical mirror
    • K. Gustafsson and B. Hok, "Fiberoptic Switching and Multiplexing with a Micromechanical Mirror," 4th Int'l. Conf. Sensors and Actuators, 1987, pp. 212-15.
    • (1987) 4th Int'l. Conf. Sensors and Actuators , pp. 212-215
    • Gustafsson, K.1    Hok, B.2
  • 3
    • 0000364231 scopus 로고
    • Surface micromachining for microsensors and microactuators
    • R. Howe, "Surface Micromachining for Microsensors and Microactuators," J. Vac. Soc. Tech. B, vol. 6, 1988, pp. 1809-13.
    • (1988) J. Vac. Soc. Tech. B , vol.6 , pp. 1809-1813
    • Howe, R.1
  • 5
    • 0001258388 scopus 로고    scopus 로고
    • The photonic cross connect(PSX)-its role in evolving optical networks
    • J. Gruber, P. Roorda, and F. LaLonde, "The Photonic Cross Connect(PSX)-its Role in Evolving Optical Networks," Proc. NFOEC 2000, pp. 678-92.
    • (2000) Proc. NFOEC , pp. 678-692
    • Gruber, J.1    Roorda, P.2    LaLonde, F.3
  • 6
    • 0031236013 scopus 로고    scopus 로고
    • Vertical mirrors fabricated by Deep RIE for fiber optic switching applications
    • C Marxer et al., "Vertical Mirrors Fabricated by Deep RIE for Fiber Optic Switching Applications," IEEE J. Micro. Mech. Sys., vol. 6, no. 3, 1997, pp. 277-385.
    • (1997) IEEE J. Micro. Mech. Sys. , vol.6 , Issue.3 , pp. 277-385
    • Marxer, C.1
  • 7
    • 0342517549 scopus 로고    scopus 로고
    • A unique latching 2×2 fiber optics switch
    • Kauai, HI, Aug. post-deadline paper
    • B. Hichwa et al., "A Unique Latching 2×2 Fiber Optics Switch," Proc. 2000 IEEE/LEOS Int'l. Conf. Opt. MEMS, Kauai, HI, Aug. 2000, post-deadline paper.
    • (2000) Proc. 2000 IEEE/LEOS Int'l. Conf. Opt. MEMS
    • Hichwa, B.1
  • 8
    • 0002898349 scopus 로고    scopus 로고
    • 1×8 Micromechanical switches based on moving waveguides
    • Kauai, HI, Aug
    • E. Ollier et al., "1×8 Micromechanical Switches based on Moving Waveguides," Proc. 2000 IEEE/LEOS Int. Conf. Opt. MEMS, Kauai, HI, Aug 2000, pp. 39-40.
    • (2000) Proc. 2000 IEEE/LEOS Int. Conf. Opt. MEMS , pp. 39-40
    • Ollier, E.1
  • 9
    • 0031652814 scopus 로고    scopus 로고
    • Micromachined ·free space switches with sub millisecond switching times
    • Y. Lin, "Micromachined ·Free Space Switches with Sub Millisecond Switching Times," OFC Tech. Digest, 1998, pp. 147-48.
    • (1998) OFC Tech. Digest , pp. 147-148
    • Lin, Y.1
  • 10
    • 84988757843 scopus 로고    scopus 로고
    • MEMS technology for optical cross-connects
    • M. Wu, "MEMS Technology for Optical Cross-Connects," OFC Tech. Digest, 1999, pp. 127.
    • (1999) OFC Tech. Digest , pp. 127
    • Wu, M.1
  • 11
    • 0010882967 scopus 로고    scopus 로고
    • A MEMS variable optical attenuator
    • Kauai, HI, Aug
    • R. Wood et al., "A MEMS Variable Optical Attenuator," Proc IEEE/LEOS Int'l. Conf. Opt. MEMS, Kauai, HI, Aug. 2000, pp. 121-22.
    • (2000) Proc IEEE/LEOS Int'l. Conf. Opt. MEMS , pp. 121-122
    • Wood, R.1
  • 12
    • 0033651334 scopus 로고    scopus 로고
    • Micromachined fault-tolerant, high-resolution, high-speed programmable fiber optic attenuator
    • THQ1-1
    • S. Sumriddetchkajorn et al., "Micromachined Fault-Tolerant, High-Resolution, High-Speed Programmable Fiber Optic Attenuator," OFC Tech. Dig. 2000, THQ1-1, pp. 240-42.
    • (2000) OFC Tech. Dig. , pp. 240-242
    • Sumriddetchkajorn, S.1
  • 13
    • 0030104301 scopus 로고    scopus 로고
    • Fabrication of a mechanical antireflection switch for fiber-to-the-home systems
    • J. Walker et al., "Fabrication of a Mechanical Antireflection Switch for Fiber-to-the-Home Systems," IEEE J. Micro. Mech. Sys., vol 5, no. 1, 1996, pp. 45-51.
    • (1996) IEEE J. Micro. Mech. Sys. , vol.5 , Issue.1 , pp. 45-51
    • Walker, J.1
  • 14
    • 0032688595 scopus 로고    scopus 로고
    • 2 mw CW single-mode operation of a tunable 1550 nm vertical cavity surface emitting laser with 50 nm tuning range
    • May
    • D. Vakhshoori et al., "2 mW CW Single-Mode Operation of a Tunable 1550 nm Vertical Cavity Surface Emitting Laser with 50 nm Tuning Range," Elect. Lett., vol. 35, no. 11, May 1999, pp. 1-2.
    • (1999) Elect. Lett. , vol.35 , Issue.11 , pp. 1-2
    • Vakhshoori, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.