Development and application of lateral comb-drive actuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 4059-4062

  Chen, Chihchung ^a   Lee, Chengkuo ^a   Lai, Yen Jyh ^a   Chen, Wenchih ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Actuators; Comb drive; MEMS; Optical switch; SOI; VOA

Indexed keywords

FOURIER TRANSFORMS; OPTICAL COMMUNICATION; OPTICAL SWITCHES; SINGLE CRYSTALS;

COMB-DRIVE ACTUATORS;

ACTUATORS;

EID: 0042863272     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4059     Document Type: Conference Paper

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