A discrete positioning microactuator: Linearity modeling and VOA application

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 16-23

  Kim, Man Geun ^a   Lee, Jong Hyun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Digital; Discrete; Linearity; Microactuator; Variable optical attenuator (VOA)

Indexed keywords

ALGORITHMS; ELECTRODES; MATHEMATICAL MODELS; WAVEGUIDE ATTENUATORS;

NONLINEAR DISPLACEMENT; VARIABLE OPTICAL ATTENUATOR;

MICROACTUATORS;

EID: 33947229350     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885847     Document Type: Article

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