Arrayed variable optical attenuator using retro-reflective MEMS mirrors

IEEE Photonics Technology Letters

Volumn 17, Issue 12, 2005, Pages 2640-2642

  Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Metropolitan area network (MAN); Microelectromechanical systems (MEMS); Retro reflection; Variable optical attenuators (VOA); Wavelength division multiplexing

Indexed keywords

LIGHT REFLECTION; METROPOLITAN AREA NETWORKS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL DESIGN; WAVEGUIDE ATTENUATORS; WAVELENGTH DIVISION MULTIPLEXING;

OPTICAL ATTENUATOR; RETRO-REFLECTION ATTENUATION; VARIABLE OPTICAL ATTENUATORS (VOA);

OPTICAL COMMUNICATION EQUIPMENT;

EID: 29244476507     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.859538     Document Type: Article

References (6)

1. K. Isamoto, K. Kato, A. Morosawa, C. Chong, H. Fujita, and H. Toshiyoshi, "A 5-Voperated MEMS variable optical attenuator by SOI bulk micromachining, " IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 570-578, May/Jun. 2004.
2. C. Chen, C. Lee, and Y.-J. Lai, "Novel VOA using in-plane reflective micromirror and off axis light attenuation, " IEEE Commun. Mag., vol. 41, no. 8, pp. S16-S20, Aug. 2003.
3. C. Lee, "Monolithic-integrated 8CH MEMS variable optical attenuators," Sens. Actuators A, vol. 123-124, pp. 596-601, Sep. 2005.
4. C. Chen, C. Lee, and J. A. Yeh, "Retro-reflection type MOEMS VOA," IEEE Photon. Technol. Lett., vol. 16, no. 10, pp. 2290-2292, Oct. 2004.
5. A. Bashir, P. Katila, N. Ogier, B. Saadany, and D. A. Khalil, "A MEMS-based VOA with very low PDL," IEEE Photon. Technol. Lett., vol. 16, no. 4, pp. 1047-1049, Apr. 2004.
6. C.-H. Kim and Y.-K. Kim, "MEMS variable optical attenuator using translation motion of 45° tilted vertical mirror," J. Micromech. Microeng., vol. 15, pp. 1466-1475, 2005.