Integrated self-assembling and holding technique applied to a 3-D MEMS variable optical attenuator

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 83-90

  Li, Lijie ^a   Zawadzka, Justyna ^a   Uttamchandani, Deepak ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

Microoptics; Optical MEMS; Self assembly; Surface micromachining

Indexed keywords

MICROMACHINING; MICROOPTICS; POLYSILICON; SELF ASSEMBLY; TEMPERATURE CONTROL; TEMPERATURE MEASUREMENT;

SURFACE MICROMACHINING; VARIABLE OPTICAL ATTENUATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 1542499811     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823222     Document Type: Article

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