Stress, interfacial effects and mechanical properties of nanoscale multilayered coatings

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 844-853

  Abadias, G ^a   Michel, A ^a   Tromas, C ^a   Jaouen, C ^a   Dub, S N ^b  

^a UNIVERSITÉ DE POITIERS   (France)

^b BAKUL INSTITUTE FOR SUPERHARD MATERIALS   (Ukraine)

Author keywords

Elastic anomalies; Hardness; Interfaces; Multilayers; Stress

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ELASTIC MODULI; EPITAXIAL LAYERS; GRAIN SIZE AND SHAPE; HARDNESS; ION BEAM ASSISTED DEPOSITION; STRESS CONCENTRATION; SURFACE CHEMISTRY; YIELD STRESS;

DUAL ION BEAM SPUTTERING; MULTILAYER COATINGS;

MULTILAYERS;

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ELASTIC MODULI; EPITAXIAL LAYERS; GRAIN SIZE AND SHAPE; HARDNESS; ION BEAM ASSISTED DEPOSITION; MULTILAYERS; STRESS CONCENTRATION; SURFACE CHEMISTRY; YIELD STRESS;

EID: 36148958283     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.068     Document Type: Article

References (130)

1. Lloyd S.J., and Molina-Aldareguia J.M. Philos. Trans. R. Soc. Lond., A 361 (2003) 2931
2. Clemens B.M., Kung H., and Barnett S.A. MRS Bull. 24 (1999) 20
3. Abadias G., Schuster I., Marty A., and Gilles B. Phys. Rev., B. 61 (2000) 6495
4. Kim I.W., Li Q., Marks L.D., and Barnett S.A. Appl. Phys. Lett. 78 (2001) 892
5. Söderberg H., Oden M., Larsson T., Hultman L., and Molina-Aldareguia J.M. Appl. Phys. Lett. 88 (2006) 191902
6. Dressler C., Abadias G., Bayle-Guillemaud P., Marty A., Schuster I., Thibault J., and Gilles B. Appl. Phys. Lett. 72 (1998) 2241
7. Abadias G., Marty A., and Gilles B. Acta Mater. 46 (1998) 6403
8. Abadias G., Tse Y.Y., Michel A., Jaouen C., and Jaouen M. Thin Solid Films 433 (2003) 166
9. Barnett S.A., and Shinn M. Annu. Rev. Mater. Sci. 24 (1994) 481
10. Holleck H., and Schier V. Surf. Coat. Technol. 76-77 (1995) 328
11. Sproul W.D. Science 273 (1996) 889
12. Bull S.J., and Jones A.M. Surf. Coat. Technol. 78 (1996) 173
13. Yashar P.C., and Sproul W.D. Vacuum 55 (1999) 179
14. Barnett S.A., and Madan A. Scr. Mater. 50 (2004) 739
15. Ziebert C., and Ulrich S. J. Vac. Sci. Technol., A 24 (2006) 554
16. Münz W.D. MRS Bull. 28 (2003) 173
17. Ducros C., Cayron C., and Sanchette F. Surf. Coat. Technol. 201 (2006) 136
18. Ducros C., and Sanchette F. Surf. Coat. Technol. 201 (2006) 1045
19. Zhang J.J., Wang M.X., Yang J., Liu Q.X., and Li D.J. Surf. Coat. Technol. 201 (2007) 5186
20. Hovsepian P.Eh., Lewis D.B., and Münz W.-D. Surf. Coat. Technol. 133-134 (2000) 166
21. Münz W.-D., Lewis D.B., Hovsepian P.Eh., Schönjahn C., Ehiasarian A., and Smith I.J. Surf. Eng. 17 (2001) 15
22. Schuller I.K., Fartash A., and Grimsditch M. MRS Bull. 15 (1990) 33
23. Yang W.M.C., Tsakalakos T., and Hilliard J.E. J. Appl. Phys. 48 (1977) 876
24. Holleck H. J. Vac. Sci. Technol., A 4 (1986) 2661
25. Helmersson U., Todorova S., Barnett S.A., Sundgren J.-E., Markert L.C., and Greene J.E. J. Appl. Phys. 62 (1987) 481
26. Bruggeman D.A. Ann. Phys. (Leipz.) 29 (1937) 160
27. Rytov S.M. Sov. Phys. Acoust. 2 (1956) 68
28. Grimsditch M. Phys. Rev., B 31 (1985) 6818
29. Grimsditch M., and Nizzoli F. Phys. Rev., B 33 (1986) 5891
30. Kueny A., Grimsditch M., Miyano K., Banerjee I., Falco C.M., and Schuller I.K. Phys. Rev. Lett. 48 (1982) 166
31. Fartash A., Fullerton E.E., Schuller I.K., Bobbin S.E., Wagner J.W., Cammarata S.C., Kumar S., and Grimsditch M. Phys. Rev., B 44 (1991) 13760
32. Danner R., Huebener R.P., Chun C.S.L., Grimsditch M., and Schuller I.K. Phys. Rev., B 33 (1986) 3696
33. Khan M.R., Chun C.S.L., Felcher G.P., Grimsditch M., Kueny A., Falco C.M., and Schuller I.K. Phys. Rev., B. 27 (1983) 7186
34. Schuller I.K., and Grimsditch M. J. Vac. Sci. Technol., B 4 (1986) 1444
35. Clemens B.M., and Eesley G.L. Phys. Rev. Lett. 61 (1988) 2356
36. Abadias G., Jaouen C., Martin F., Pacaud J., Djemia Ph., and Ganot F. Phys. Rev., B 65 (2002) 212105
37. Fullerton E.E., Kumar S., Grimsditch M., Kelly D.M., and Schuller I.K. Phys. Rev., B 48 (1993) 2560
38. Bell J.A., Bennett W.R., Zanoni R., Stegeman G.I., Falco C.M., and Nizzoli F. Phys. Rev., B 35 (1987) 4127
39. Hues S.M., Bhadra R., Grimsditch M., Fullerton E., and Schuller I.K. Phys. Rev., B 39 (1989) 12966
40. Carlotti G., Fioretto D., Socino G., Rodmacq B., and Pelosin V. J. Appl. Phys. 71 (1992) 4897
41. Rossignol C., Perrin B., Bonello B., Djemia P., Moch P., and Hurdequint H. Phys. Rev., B 70 (2004) 094102
42. Meng W.J., Eesley G.L., and Svinarich K.A. Phys. Rev., B 42 (1990) 4881
43. Perrin B., Bonello B., Jeannet J.C., and Romatet E. Prog. Nat. Sci. 6 (1996) S-444
44. Davis B.M., Li D.X., Seidman D.N., Ketterson J.B., Bhadra R., and Grimsditch M. J. Mater. Res. 7 (1992) 1356
45. Dutcher J.R., Lee S., England C.D., Stegeman G.I., and Falco C.M. Mater. Sci. Eng., A 126 (1990) 13
46. Kumar S., Bhadra R., Fartash A., Grimsditch M., Kim C., Qadri S.B., and Edelstein A.S. Phys. Rev., B 44 (1991) 5905
47. Hartmann C., Mathieu C., Hillebrands B., Kim S., and Schuller I.K. Phys. Rev., B 55 (1997) 14074
48. Dutcher J.R., Lee S., Kim J., Stegeman G.I., and Falco C.M. Phys. Rev. Lett. 65 (1990) 1231
49. Bisanti P., Brodsky M.B., Felcher G.P., Grimsditch M., and Sill L.R. Phys. Rev., B 35 (1987) 7813
50. Hassdorf R., Grimsditch M., Felsch W., and Schulte O. Phys. Rev., B 56 (1997) 5814
51. Schuller I.K., and Rahman A. Phys. Rev. Lett. 50 (1983) 1377
52. Wolf D., and Lutsko J.F. Phys. Rev. Lett. 60 (1988) 1170
53. Wolf D., and Lutsko J.F. J. Appl. Phys. 66 (1989) 1961
54. Wu T.-B. J. Appl. Phys. 53 (1982) 5265
55. Pickett W.E. J. Phys. F. Met. Phys. 12 (1982) 2195
56. Huberman M.L., and Grimsditch M. Phys. Rev., B 46 (1992) 7949
57. Cammarata R.C., and Sieradzki K. Phys. Rev. Lett. 62 (1989) 2005
58. Jankowski A.F., and Tsakalakos T. J. Phys. F. Met. Phys. 15 (1985) 1279
59. Richardson G., Makous J.L., Yu H.Y., and Edelstein A.S. Phys. Rev., B 45 (1992) 12114
60. Xia H., Zhang X.K., Hu A., Jiang S.S., Peng R.W., Zhang W., Feng D., Carlotti G., Fioretto D., Socino G., and Verdini L. Phys. Rev., B 47 (1993) 3890
61. Martin F., Jaouen C., Pacaud J., Abadias G., Djemia Ph., and Ganot F. Phys. Rev., B 71 (2005) 045422
62. Chu X., and Barnett S.A. J. Appl. Phys. 77 (1995) 4403
63. Misra A., Hirth J.P., and Hoagland R.G. Acta Mater. 53 (2005) 4817
64. Kramer D.E., and Foecke T. Philos. Mag., A 82 (2002) 3375
65. Shinn M., Hultman L., and Barnett S.A. J. Mater. Res. 7 (1992) 901
66. Chu X., Barnett S.A., Wong M.S., and Sproul W.D. Surf. Coat. Technol. 57 (1993) 13
67. Barshilia H.C., and Rajam K.S. Surf. Coat. Technol. 183 (2004) 174
68. Li G., Han Z., Tian J., Xu J., and Gu M. J. Vac. Sci. Technol. A 20 (2002) 674
69. Mirkarimi P.B., Hultman L., and Barnett S.A. Appl. Phys. Lett. 57 (1990) 2654
70. Mirkarimi P.B., Barnett S.A., Hubbard K.M., Jervis T.R., and Hultman L. J. Mater. Res. 9 (1994) 1456
71. Yashar P., Barnett S.A., Rechner J., and Sproul W.D. J. Vac. Sci. Technol., A 16 (1998) 2913
72. Yang Q., He C., Zhao L.R., and Immarigeon J.-P. Scr. Mater. 46 (2002) 293
73. Barshilia H.C., Jain A., and Rajam K.S. Vacuum 72 (2004) 241
74. Uglov V.V., Anishchik V.M., Khodasevich V.V., Prikhodko Zh.L., Zlotski S.V., Abadias G., and Dub S.N. Surf. Coat. Technol. 180-181 (2004) 519
75. Soe W.-H., and Yamamoto R. Mater. Chem. Phys. 50 (1997) 176
76. Xu J., Li G., and Gu M. Thin Solid Films 370 (2000) 45
77. An J., and Zhang Q.Y. Surf. Coat. Technol. 200 (2005) 2451
78. Setoyama M., Nakayama A., Tanaka M., Kitagawa N., and Nomura T. Surf. Coat. Technol. 86-87 (1996) 225
79. Madan A., Kim I.W., Cheng S.C., Yashar P., Dravid V.P., and Barnett S.A. Phys. Rev. Lett. 78 (1997) 1743
80. Pankov V., Evstigneev M., and Prince R.H. J. Appl. Phys. 92 (2002) 4255
81. Xu J., Kamiko M., Zhou Y., Yamamoto R., Li G., and Gu M. J. Appl. Phys. 89 (2001) 3674
82. Nordin M., Larsson M., and Hogmark S. Surf. Coat. Technol. 106 (1998) 234
83. Söderberg H., Oden M., Molina-Aldareguia J.M., and Hultman L. J. Appl. Phys. 97 (2005) 114327
84. Xu J., Yu L., Azuma Y., Fujimoto T., Umehara H., and Kojima I. Appl. Phys. Lett. 81 (2002) 4139
85. Chen Y.-H., Lee K.W., Chiou W.-A., Chung Y.-W., and Keer L.M. Surf. Coat. Technol. 146-147 (2001) 209
86. Veprek S., Reiprich S., and Shizhi L. Appl. Phys. Lett. 66 (1995) 2640
87. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Thin Solid Films 476 (2005) 1
88. Patscheider J. MRS Bull. 28 (2003) 180
89. Hao S., Delley B., Veprek S., and Stampfl C. Phys. Rev. Lett. 97 (2006) 086102
90. Madan A., Wang Y.-Y., Barnett S.A., Engström C., Ljungcrantz H., Hultman L., and Grimsditch M. J. Appl. Phys. 84 (1998) 776
91. Madan A., Barnett S.A., Misra A., Kung H., and Nastasi M. J. Vac. Sci. Technol., A 19 (2001) 952
92. Barnett S.A., Madan A., Kim I., and Martin K. MRS Bull. 28 (2003) 169
93. Shih K.K., and Dove D.B. Appl. Phys. Lett. 61 (1992) 654
94. Koehler J.S. Phys. Rev., B 2 (1970) 547
95. Embury J.D., and Hirth J.P. Acta Metall. Mater. 42 (1994) 2051
96. Anderson P.M., and Li C. Nanostruct. Mater. 5 (1995) 349
97. Misra A., Hirth J.P., and Kung H. Philos. Mag. 82 (2002) 2935
98. Cahn J.W. Acta Metall. 11 (1963) 1275
99. Hoagland R., Kurtz R.J., and Henajer Jr. C.H. Scr. Mater. 50 (2004) 775
100. Abadias G., Dub S., and Shmegera R. Surf. Coat. Technol. 200 (2006) 6538
101. Long Y., Giuliani F., Lloyd S.J., Molina-Aldareguia J., Barber Z.H., and Clegg W.J. Composites B 37 (2006) 542
102. Molina-Aldareguia J.M., Lloyd S.J., Oden M., Joelsson T., Hultman L., and Clegg W.J. Philos. Mag., A 82 (2002) 1983
103. Ljungcrantz H., Engström C., Hultman L., Olsson M., Chu X., Wong M.S., and Sproul W.D. J. Vac. Sci. Technol., A 16 (1998) 3104
104. Shinn M., and Barnett S.A. Appl. Phys. Lett. 64 (1994) 61
105. Bahr D.F., Hoehn J.W., Moody N.R., and Gerberich W.W. Acta Mater. 45 (1997) 5163
106. Windischmann H. Crit. Rev. Solid State Mater. Sci. 17 (1992) 547
107. D'Heurle F.M. Metall. Trans. 1 (1970) 725
108. Davis C.A. Thin Solid Films 226 (1993) 30
109. D'Heurle F.M., and Harper J.M.E. Thin Solid Films 171 (1989) 81
110. Pauleau Y. In: Nalwa H.S. (Ed). Handbook of Thin Film Materials, volume 1:Deposition and Processing of Thin Films (2002), Academic Press 455 ch. 9
111. Janssen G.C.A.M., and Kamminga J.D. Appl. Phys. Lett. 85 (2005) 3086
112. Lifshitz Y., Kasi S.R., Rabelais J.W., and Eckstein W. Phys. Rev., B 41 (1990) 10468
113. Hofsäss H., Feldermann H., Merk R., Sebastian M., and Ronning C. Appl. Phys., A 66 (1998) 153
114. Bilek M.M.M., and McKenzie D.R. Surf. Coat. Technol. 200 (2006) 4345
115. Abadias G., and Tse Y.Y. J. Appl. Phys. 95 (2004) 2414
116. Debelle A., Abadias G., Michel A., and Jaouen C. Appl. Phys. Lett. 84 (2004) 5034
117. Kamminga J.-D., de Keijser Th.H., Delhez R., and Mittemeijer E.J. J. Appl. Phys. 88 (2000) 6332
118. Eshelby J.D. Solid State Phys. 3 (1956) 79
119. Noyan I.C., and Cohen J.B. Residual Stress, Measurement by Diffraction and Interpretation (1987), Springer-Verlag, New-York
120. Debelle A., Michel A., Abadias G., and Jaouen C. Nucl. Instrum. Methods B 242 (2006) 461
121. A. Debelle, PhD Thesis, University of Poitiers, 2005.
122. A. Debelle, G. Abadias, A. Michel, C. Jaouen, V. Pelosin, submitted for publication to J. Vac. Sci. Technol.
123. Politi P., Grenet G., Marty A., Ponchet A., and Villain J. Phys. Rep. 324 (2000) 271
124. Abadias G., Tse Y.Y., Guerin Ph., and Pelosin V. J. Appl. Phys. 99 (2006) 113519
125. Martin F., Pacaud J., Abadias G., Jaouen C., and Guérin Ph. Appl. Surf. Sci. 188 (2002) 90
126. Fullerton E.E., Schuller I.K., Vanderstraeten H., and Bruynseraede Y. Phys. Rev., B 45 (1992) 9292
127. Tse Y.Y., Babonneau D., Michel A., and Abadias G. Surf. Coat. Technol. 180-181 (2004) 470
128. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
129. H. Ljungcrantz, Ph.D. thesis, Linköping, 1995.
130. Abadias G., Tromas C., Tse Y.Y., and Michel A. Mater. Res. Soc. Symp. Proc. 880 E BB2.8 (2005)