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Surface and Coatings Technology

Volumn 200, Issue 7, 2005, Pages 2451-2458

Structure, morphology and nanoindentation behavior of multilayered TiN/TaN coatings

(2) An, Jian a,b Zhang, Q Y a

a DALIAN UNIVERSITY OF TECHNOLOGY (China)

b JILIN UNIVERSITY (China)

Author keywords

Multilayered TiN TaN coatings; Nanoindentation behavior; Structure

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; MULTILAYERS; SPUTTER DEPOSITION; STRUCTURE (COMPOSITION); TANTALUM COMPOUNDS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

MULTILAYERED COATINGS; NANOINDENTATION BEHAVIOR;

INORGANIC COATINGS;

COATING;

EID: 29244469923 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.204 Document Type: Article

Times cited : (23)

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