Mechanical properties of ceramic multilayers: TiN/CrN, TiN/ZrN, and TiN/TaN

Materials Chemistry and Physics

Volumn 50, Issue 2, 1997, Pages 176-181

  Soe, W H ^a   Yamamoto, R ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Ceramic multilayers; Coherency strain; Dislocation; Hardness; Nanoindentation test; Nitride

Indexed keywords

CERAMIC MATERIALS; CRYSTAL GROWTH; CRYSTAL LATTICES; DISLOCATIONS (CRYSTALS); ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL VARIABLES MEASUREMENT; POLYCRYSTALLINE MATERIALS; STRAIN; TITANIUM NITRIDE;

CHROMIUM NITRIDE; COHERENCY STRAIN; NANOINDENTATION TESTS; TANTALUM NITRIDE;

MULTILAYERS;

EID: 0031235205     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(97)80256-8     Document Type: Article

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