Structural characterization and mechanical properties of Ti-Zr-N coatings, deposited by vacuum arc

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 519-525

  Uglov, V V ^a   Anishchik, V M ^a   Khodasevich, V V ^a   Prikhodko, Zh L ^a   Zlotski, S V ^a   Abadias, G ^b   Dub, S N ^c  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b UNIVERSITÉ DE POITIERS   (France)

^c BAKUL INSTITUTE FOR SUPERHARD MATERIALS   (Ukraine)

Author keywords

Multicomponent coatings; Multilayers; Nanohardness; Residual stress

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ELASTIC MODULI; FILMS; ION BOMBARDMENT; PLASMA FLOW; RESIDUAL STRESSES; SOLID SOLUTIONS; TITANIUM COMPOUNDS; VACUUM APPLICATIONS; ZIRCONIUM COMPOUNDS;

NANOHARDNESS; VACUUM-ARC DEPOSITION;

MULTILAYERS;

COATING;

EID: 1842782630     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.095     Document Type: Article

References (22)

1. Chu X. Barnet S.A. Wong M.S. Sproul W.D. Surf. Coat. Technol. 57 1993 13
2. Zeng X.T. Surf. Coat. Technol. 113 1999 75
3. Sproul W.D. Surf. Coat. Technol. 86-87 1996 170
4. Noyan I.C. Cohen J.B. Residual Stress, Measurement by Diffraction and Interpretation 1987 Springer New York
5. Oliver W.C. Pharr J.M. J. Mater. Res. 7 6 1992 1564-1583
6. Fullerton E.E. Schuller I.K. Vanderstraeten H. Bruynseraede Y. Phys. Rev. B 45 1992 9292
7. Zeng X.T. Zhang S. Sun S.Q. Liu Y.C. Thin Solid Films 424 2003 99-102
8. Chu X. Branett S.A. J. Appl. Phys. 77 9 1995 4403
9. Koehler J.S. Phys. Rev. B 2 1970 547
10. Helmersson U. Todorova S. Barnett S.A. Sundgren J.-E. Markert L.C. Greene J.E. J. Appl. Phys. 62 1987 481
11. Shinn M. Hultman L. Barnett S.A. J. Mater. Res. 7 1992 901
12. Jankowski A.F. Tsakalakos T. J. Phys. F: Met. Phys. 15 1985 1279
13. Donohue L.A. Cawley J. Brooks J.S. Surf. Coat. Technol. 72 1995 128
14. Knotek O. Barimani A. Thin Solid Films 174 1989 51
15. Grimberg I. Zhitomirsky V.N. Boxman R.L. Goldsmith S. Weiss B.Z. Surf. Coat. Technol. 108-109 1998 154-159
16. Boxman R.L. Zhitomirsky V.N. Grimberg I. Rapoport L. Goldsmith S. Weiss B.Z. Surf. Coat. Technol. 125 2000 257-262
17. Vyskocil J. Musil J. J. Vac. Sci. Technol. A 10 1992 1740
18. Bendavid A. Martin P.J. Netterfield R.P. Kinder T.J. Surf. Coat. Technol. 70 1994 97
19. Kobayashi M. Doi Y. Thin Solid Films 54 1978 67
20. Gergaud P. Labat S. Thomas O. Thin Solid Films 319 1998 9
21. Ljungcrantz H. Hultman L. Sundgren J.E. Hakansonn G. Karlsson L. J. Appl. Phys. 78 1995 8362
22. A.R. Andrievsky, I.I. Spivak. Prochnost' tugoplavkikh soedinenii i materialov na ikh osnove, Sprav. Izdanie, Chelabinsk, Mettalurgia, 1989, p. 368