Hardness and stability of metal-nitride nanoscale multilayers

Scripta Materialia

Volumn 50, Issue 6, 2004, Pages 739-744

  Barnett, S A ^a,b   Madan, Anita ^a,c  

^a Northwestern University   (United States)

^b Functional Coating Technology LLC   (United States)

^c IBM MICROELECTRONICS   (United States)

Author keywords

Hardness; Multilayers; Nanometer; Nitrides; Stability; Superlattices

Indexed keywords

ANNEALING; COATINGS; CRYSTAL STRUCTURE; DEPOSITION; HARDNESS; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; NITRIDES; PLASTICITY; SOLUBILITY; SUPERLATTICES; THERMODYNAMIC STABILITY; THIN FILMS;

INTERDIFFUSION; ISOSTRUCTURAL NANOLAYERS;

MULTILAYERS;

EID: 0346499163     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2003.11.042     Document Type: Article

References (28)

1. Barnett S.A. Francombe M., Vossen J.A. Physics of thin films. 1993;1 Academic Press, New York.
2. Barnett S.A., Shinn M. Ann. Rev. Mater. Sci. 24:1994;481.
3. Chu X., Barnett S.A. J. Appl. Phys. 77:1995;4403.
4. Anderson P.M., Li C. Nanostruct. Mater. 5:1995;349.
5. Was G.S., Foecke T. Thin Solid Films. 286:1996;1.
6. Oden M., Ljungcrantz H., Hultman L. J. Mater. Res. 12:1997;2134.
7. Krzanowski J.E. Mater. Res. Soc. Symp. Proc. 239:1992;509.
8. Engström C., Birch J., Hultman L., Lavoie C., Cabral C., Jordan-Sweet J.L., et al. J. Vac. Sci. Technol. A. 17:1999;2920.
9. Barnett S.A., Madan A., Kim I.W., Martin K. MRS Bull. 2003;169.
10. Chu X., Wong M.S., Sproul W.D., Rohde S.L., Barnett S.A. J. Vac. Sci. Technol. A. 10:1992;1604.
11. He J.L., Li W.Z., Li H.D. Jpn. J. Appl. Phys. Lett. 37:1997;679.
12. Liu C.H., Li W.Z., Li H.D. Nucl. Instrum. Meth. B. 95:1995;323.
13. Moustakas T.D., Scanlon J., Koo J.Y., Deckman H.W., Ozekcin A., Friedman R., et al. Mater. Sci. Eng. B. 6:1990;179.
14. Madan A., Wang Y.-Y., Barnett S.A., Engstrom C., Ljungcrantz H., Hultman L., et al. J. Appl. Phys. 84:1998;776.
15. Madan A., Chu X., Barnett S.A. Appl. Phys. Lett. 68:1996;2198.
16. Engstrom C., Madan A., Birch J., Nastasi M., Hultman L., Barnett A. J. Mater. Res. 15:2000;554.
17. Chu X., Wong M.S., Sproul W.D., Barnett S.A. Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films. J. Mater. Res. 14:1999;2500.
18. Mirkarimi P.B., Shinn M., Barnett S.A. J. Vac. Sci. Technol. A. 10:1992;681.
19. Madan A., Barnett S.A., Misra A., Kung H., Nastasi M. J. Vac. Sci. Technol. A. 19:2001;952.
20. Kim I., Madan A., Guruz M., Dravid V., Barnett S.A. J. Vac. Sci. Technol. A. 19:2001;2069.
21. Villars P., Prince A., Okamoto H. Handbook of ternary alloy phase diagrams. 1995;ASM International, Materials Park, Ohio.
22. Kubaschewski O., Evans E.L. Metal physics and physical metallurgy. 1951;Butterworth-Springer, London.
23. Paratt L.G. Phys. Rev. B. 95:1954;359.
24. Madan A., Yashar P., Shinn M., Barnett S.A. Thin Solid Films. 302:1997;147.
25. Misra A, Kung H, Mitchell TE, Jervis TR, Nastasi M. In: Cammarata RC, Nastasi MA, Busso EP, Oliver WC, editors. Thin-films - stresses and mechanical properties VII. MRS Proceedings, vol. 505. p. 583.
26. See articles in Yip S., Wolf D. Atomic properties of interface materials. 1992;Chapman and Hall, London.
27. Verhoeven J.D., Chumbley L.S., Laabs F.C., Spitzig W.A. Acta. Metall. Mater. 39:1991;2825.
28. Tabor D. J. Instr. Metals. 79:1951;1.