Formation of cubic-AlN in TiN/AlN superlattice

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 225-230

  Setoyama, M ^a   Nakayama, A ^a   Tanaka, M ^a   Kitagawa, N ^a   Nomura, T ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

Arc ion plating; Ceramic film; Cubic AlN; TiN AlN superlattice

Indexed keywords

ALUMINUM COMPOUNDS; CERAMIC COATINGS; CRYSTAL STRUCTURE; FAST FOURIER TRANSFORMS; HARDNESS; PLATING; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ARC ION PLATING; CERAMIC FILMS; CERAMIC SUPERLATTICES; CUBIC ALUMINUM NITRIDE; SODIUM CHLORIDE TYPE; WURTZITE TYPE;

SUPERLATTICES;

EID: 0030383011     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03033-2     Document Type: Article

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