Stress in hard metal films

Applied Physics Letters

Volumn 85, Issue 15, 2004, Pages 3086-3088

  Janssen, G C A M ^a   Kamminga, J D ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NETHERLANDS INSTITUTE FOR METALS RESEARCH   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; CRYSTAL MICROSTRUCTURE; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; POLYCRYSTALLINE MATERIALS; SHRINKAGE; TENSILE STRESS; THERMAL STRESS; TRANSMISSION ELECTRON MICROSCOPY;

BIAS VOLTAGE; HARD METAL FILMS; STRESS GRADIENTS;

METALLIC FILMS;

EID: 8644239494     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1807016     Document Type: Article

References (9)

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