Stability of nanometer-thick layers in hard coatings

MRS Bulletin

Volumn 28, Issue 3, 2003, Pages

  Barnett, Scott A ^a   Madan, Anita ^b   Kim, Ilwon ^a   Martin, Keith ^c  

^a Functional Coating Technology   (United States)

^b IBM MICROELECTRONICS   (United States)

^c NONE

Author keywords

Annealing; Hardness testing; Superhard coating materials; Thin films

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; HARDNESS; INTERDIFFUSION (SOLIDS); NANOSTRUCTURED MATERIALS; THERMODYNAMIC STABILITY;

EPITAXIAL STABILIZATION;

COATINGS;

EID: 0037345188     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2003.57     Document Type: Review

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