Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: Growth and structural characterisation

Thin Solid Films

Volumn 433, Issue 1-2 SPEC., 2003, Pages 166-173

  Abadias, G ^a   Tse, Y Y ^a   Michel, A ^a   Jaouen, C ^a   Jaouen, M ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Growth; Ion beam sputtering; Multilayers; Titanium nitride

Indexed keywords

COMPOSITE MATERIALS; FILM GROWTH; GRAIN SIZE AND SHAPE; INTERFACES (MATERIALS); ION BEAMS; MORPHOLOGY; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR SUPERLATTICES; SPUTTER DEPOSITION; SUBSTRATES; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

NANOSCALED COMPOSITES;

THIN FILMS;

EID: 0038519560     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00307-9     Document Type: Conference Paper

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