Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings

Vacuum

Volumn 72, Issue 3, 2003, Pages 241-248

  Barshilia, Harish C ^a   Jain, Anjana ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

Nanoindentation; Reactive DC magnetron sputtering; Thermal stability; TiN CrN multilayers; X ray diffraction

Indexed keywords

ATOMIC FORCE MICROSCOPY; HARDNESS; MAGNETRON SPUTTERING; MULTILAYERS; NANOSTRUCTURED MATERIALS; STRUCTURE (COMPOSITION); SUBSTRATES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS;

MULTILAYER COATINGS;

TITANIUM NITRIDE;

EID: 0142217260     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.08.003     Document Type: Article

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