Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

Journal of Applied Physics

Volumn 95, Issue 5, 2004, Pages 2414-2428

  Abadias, G ^a   Tse, Y Y ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; MATHEMATICAL MODELS; POINT DEFECTS; RESIDUAL STRESSES; SPUTTER DEPOSITION; STRAIN; TEXTURES; THICKNESS MEASUREMENT; THIN FILMS; VOLTAGE MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

CRYSTALLITES; HYDROSTATIC STRESSES;

TITANIUM NITRIDE;

EID: 1642369286     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1646444     Document Type: Article

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