New routes in the preparation of mechanically hard films

Science

Volumn 273, Issue 5277, 1996, Pages 889-892

  Sproul, William D ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; HARDNESS; INORGANIC COATINGS; NITRIDES; OXIDES; POLYCRYSTALLINE MATERIALS; SINGLE CRYSTALS; SPUTTER DEPOSITION; STRENGTH OF MATERIALS; SUBSTRATES; SUPERLATTICES; WEAR RESISTANCE;

HARD COATINGS; HARD FILMS; NONCONDUCTING OXIDE FILMS; PULSE DC POWER; REACTIVE GAS PARTIAL PRESSURE CONTROL; REACTIVE SPUTTERING; SUPERHARD NITRIDE SUPERLATTICE COATINGS; SUPERLATTICE STRENGTH ENHANCEMENT;

FILM PREPARATION;

OXIDE;

ARTICLE; CRYSTAL STRUCTURE; DIRECT CURRENT; EQUIPMENT; FILM; HARDNESS; MATERIALS; MECHANICS; PRESSURE; PRIORITY JOURNAL; TECHNOLOGY;

EID: 0345065237     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.273.5277.889     Document Type: Article

References (23)

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21. J. M. Schneider, W. J. Chia, J. Rechner, W. D. Sproul, M.-S. Wong, in preparation.
22. M.-S. Wong et al., Surf. Coat. Technol., in press.
23. The polycrystalline nitride superlattice work was sponsored by the U.S. Department of Energy, Division of Materials Sciences, Office of Basic Energy Science, grant DE-FG02-926ER45434. The oxide superlattice work is being sponsored by the U.S. Air Force Office of Scientific Research, grant F49620-95-0177.