Structure and mechanical properties of polycrystalline CrN/TiN superlattices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2913-2918

  Yashar, P ^a   Barnett, S A ^a   Rechner, J ^b,c   Sproul, W D ^b,c  

^a Northwestern University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

^c Sputtered Films Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032394142     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581439     Document Type: Article

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