Multilayered and nanolayered hard nitride thin films deposited by cathodic arc evaporation. Part 1: Deposition, morphology and microstructure

Surface and Coatings Technology

Volumn 201, Issue 1-2, 2006, Pages 136-142

  Ducros, C ^a   Cayron, C ^a   Sanchette, F ^a  

^a CEA GRENOBLE   (France)

Author keywords

Arc evaporation; Superlattice; TEM; X ray diffraction

Indexed keywords

DEPOSITION; EVAPORATION; MICROSTRUCTURE; MORPHOLOGY; MULTILAYERS; SUPERLATTICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS;

ARC EVAPORATION; HARD NITRIDE; MULTILAYER COATINGS;

NITRIDES;

DEPOSITION; EVAPORATION; MICROSTRUCTURE; MORPHOLOGY; MULTILAYERS; NITRIDES; SUPERLATTICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS;

EID: 33746146968     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.102     Document Type: Article

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