Ion-irradiation induced stress relaxation in metallic thin films and multilayers grown by ion beam sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 461-465

  Debelle, A ^a   Michel, A ^a   Abadias, G ^a   Jaouen, C ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

Epitaxy; Ion irradiation; Multilayers; Sputtering; Stress relaxation

Indexed keywords

EPITAXIAL GROWTH; HYDROSTATIC PRESSURE; ION BEAMS; MULTILAYERS; SPUTTERING; STRESS RELAXATION; THIN FILMS; X RAY DIFFRACTION;

GROWTH STRESS; HYDROSTATIC STATE; ION IRRADIATION; METALLIC THIN FILMS;

METALLIC FILMS;

EID: 28544451691     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.046     Document Type: Conference Paper

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