Deformation structures under indentations in TiN/NbN single-crystal multilayers deposited by magnetron sputtering at different bombarding ion energies

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 82, Issue 10, 2002, Pages 1983-1992

  Molina Aldareguia, J M ^a   Lloyd, S J ^a   Oden M ^b   Joelsson, T ^b   Hultman, L ^b   Clegg, W J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; HARDNESS; INDENTATION; ION BOMBARDMENT; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; SINGLE CRYSTALS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

DEFORMATION STRUCTURES; ION ENERGY; REACTIVE MAGNETRON SPUTTERING; SINGLE CRYSTAL MULTILAYERS;

MULTILAYERS;

EID: 0037055314     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418610208235710     Document Type: Article

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