Structure and properties of reactive DC magnetron sputtered TiN/NbN hard superlattices

Surface and Coatings Technology

Volumn 183, Issue 2-3, 2004, Pages 174-183

  Barshilia, Harish C ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

Corrosion behavior; Nanoindentation; Reactive DC magnetron sputtering; Structural characterization; Thermal stability; TiN NbN superlattices

Indexed keywords

COATINGS; INDENTATION; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; SILICON; STEEL; SUBSTRATES; SUPERLATTICES; X RAY DIFFRACTION ANALYSIS;

POTENTIODYNAMIC POLARIZATION; PRINCIPLE REFLECTION (PR);

TITANIUM NITRIDE;

COATING; CORROSION RESISTANCE; MECHANICAL PROPERTY; STRUCTURAL ANALYSIS; TOOL WEAR;

EID: 2442505578     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.070     Document Type: Article

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