Superhardness effects of heterostructure NbN/TaN nanostructured multilayers

Journal of Applied Physics

Volumn 89, Issue 7, 2001, Pages 3674-3678

  Xu, Junhua ^a   Kamiko, Masao ^a   Zhou, Yaomin ^a   Yamamoto, Ryoichi ^a   Li, Geyang ^b   Gu, Mingyuan ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035307821     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1353809     Document Type: Article

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