Stabilization of cubic AlN in epitaxial AlN/TiN superlattices

Physical Review Letters

Volumn 78, Issue 9, 1997, Pages 1743-1746

  Madan, A ^a   Kim, I W ^a   Cheng, S C ^a   Yashar, P ^a   Dravid, V P ^a   Barnett, S A ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 6244305376     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.78.1743     Document Type: Article

References (31)

1. S. Strite and H. Morkoç, J. Vac. Sci. Technol. B, 10, 1237 (1992).
2. N. E. Christensen and I Gorczyca, Phys. Rev. B, 50, 4397 (1994).
3. W. Kohn and L. J. Sham, Phys. Rev., A140, 1133 (1965).
4. M. Ueno et al, Phys. Rev. B, 45, 10 123 (1992).
5. Q. Xia, H. Xia, and A. L. Ruoff, J. Appl. Phys., 73, 8198 (1993).
6. I. Ivanov et al, J. Appl. Phys., 78, 5721 (1995).
7. J. Chaudhuri et al, J. Appl. Phys., 77, 6263 (1995).
8. R. D. Vispute et al, J. Appl. Phys., 77, 4724 (1995).
9. I. Petrov et al, Appl. Phys. Lett., 60, 2491 (1992).
10. L. Hultman et al, Thin Solid Films, 215, 152 (1992).
11. W.-T. Lin et al, Appl. Phys. Lett., 66, 2066 (1995).
12. R. Bruinsma and A. Zangwill, J. Phys., 47, 2055 (1986).
13. D. M. Wood and A. Zunger, Phys. Rev. B, 40, 4062 (1989).
14. W.-D. Munz, J. Vac. Sci. Technol. A, 4, 2717 (1986).
15. S. A. Barnett, in Physics of Thin Films, M. Francombe and J. A. Vossen (Academic Press, New York, 1993).
16. J. C. Schuster and J. Bauer, J. Solid State Chem., 53, 260 (1984).
17. X. Chu and S. A. Barnett, J. Appl. Phys., 77, 4403 (1995).
18. O. Kubaschewski, C. B. Alcock, and P. J. Spencer, Materials Thermochemistry (Pergamon Press, Oxford, England, 1993).
19. P. B. Mirkarimi, M. Shinn, and S. A. Barnett, J. Vac. Sci. Technol. A, 10, 1618 (1992).
20. L. Hultman et al, J. Cryst. Growth, 135, 309 (1994).
21. D. B. Williams, Practical Electron Microscopy in Materials Science (Philips Instrumentation Inc, New Jersey, 1987).
22. L. G. Paratt, Phys. Rev., 95, 359 (1954).
23. D. B. McWhan, in Synthetic Modulated Structures, L. L. Chang and B. C. Giessen (Academic Press, New York, 1985).
24. A. Madan et al (unpublished).
25. J. E. Hilliard, in Modulated Structures-1979, J. M. Cowley, J. B. Cohen, M. B. Salamon, and B. J. Wuensch (American Institute of Physics, New York, 1979).
26. R. Kato and J. Hama, J. Phys., 6, 7617 (1994).
27. H. von Känel et al, Phys. Rev. Lett., 74, 1163 (1995).
28. H. von Känel et al, Phys. Rev. B, 45, 13 807 (1992).
29. K. Kim et al, Phys. Rev. B, 53, 16 310 (1996).
30. J. Schaffer et al, The Science and Design of Engineering Materials (Irwin, Chicago, 1995).
31. P. Yashar et al (unpublished).