Epitaxial stabilization of cubic- SiNx in TiN/SiNx multilayers

Applied Physics Letters

Volumn 88, Issue 19, 2006, Pages

  Söderberg, Hans ^a   Odán, Magnus ^a   Larsson, Tommy ^b   Hultman, Lars ^c   Molina Aldareguia, Jon M ^d  

^a LULEÅ UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Ombenning by 14 ^*  (Sweden)

^c LINKÖPING UNIVERSITY   (Sweden)

^d CEIT   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; MULTILAYERS; SEMICONDUCTOR GROWTH; TRANSMISSION ELECTRON MICROSCOPY;

ELASTIC SHEAR MODULUS; NANOINDENTATION; POLYTYPES; SUPERHARDENING EFFECTS;

SILICON NITRIDE;

EID: 33646708477     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2202145     Document Type: Article

References (12)

1. S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, and J. Prochazka, Thin Solid Films 476, 1 (2005).
2. A. Niederhofer, T. Bolom, P. Nesládek, K. Moto, C. Eggs, D. S. Patil, and S. Veprek, Surf. Coat. Technol. 146/147, 183 (2001).
3. H. Söderberg, J. M. Molina-Aldareguia, L. Hultman, and M. Odán, J. Appl. Phys. 97, 114327 (2005).
4. Y.-H. Chen, K. W. Lee, W.-A. Chiou, Y.-W. Chung, and L. M. Keer, Surf. Coat. Technol. 146/147, 209 (2001).
5. H. L. Skriver, The LMTO Method: Muffin Tin Orbitals and Electronic Structure (Springer, Berlin, 1984).
6. A. Flink, T. Larsson, J. Sjölán, L. Karlsson, and L. Hultman, Surf. Coat. Technol. 200, 1535 (2005).
7. P. C. Yashar and W. D. Sproul, Vacuum 55, 179 (1999).
8. T. Korhonen, M. J. Puska, and R. M. Nieminen, Phys. Rev. B 51, 9526 (1995).
9. J. S. Koehler, Phys. Rev. B 2, 547 (1970).
10. R. Ahuja, O. Eriksson, J. M. Wills, and B. Johansson, Phys. Rev. B 53, 3072 (1996).
11. M. Marlo and V. Milman, Phys. Rev. B 62, 2899 (2000).
12. J. Xu, M. Kamiko, Y. Zhou, R. Yamamoto, G. Li, and M. Gu, J. Appl. Phys. 89, 3674 (2001).