Adding functionality to microchips by wafer post-processing

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 576, Issue 1, 2007, Pages 142-149

  Schmitz, Jurriaan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

CMOS; Microfabrication; Microsystems; Particle detectors; Radiation detectors; Radiation imaging

Indexed keywords

CMOS INTEGRATED CIRCUITS; IONIZING RADIATION; LIQUID CRYSTALS; MICROFABRICATION; MICROSYSTEMS; PARTICLE DETECTORS; SILICON WAFERS;

LIQUID-CRYSTAL-ON-SILICON; PHOTORESIST LAYERS; RADIATION IMAGING; SUSPENDED MEMBRANES;

MICROPROCESSOR CHIPS;

EID: 34248138498     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2007.01.142     Document Type: Article

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