A new concept of monolithic silicon pixel detectors: Hydrogenated amorphous silicon on ASIC

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 518, Issue 1-2, 2004, Pages 366-372

  Anelli, G ^a   Commichau, S C ^b   Despeisse, M ^a   Dissertori, G ^b   Jarron, P ^a   Miazza, C ^c   Moraes, D ^a   Shah, A ^c   Viertel, G M ^b   Wyrsch, N ^c  

^a CERN   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Metrology; Solid state detectors

Indexed keywords

ARRAYS; DIODES; GLASS; HYDROGENATION; INTEGRATED CIRCUITS; OPTIMIZATION; RADIATION DETECTORS; SOLID STATE DEVICES; SUBSTRATES; VAPOR DEPOSITION;

MONOLITHIC PIXEL DETECTORS; SOLID STATE DETECTORS;

AMORPHOUS SILICON;

EID: 0742286849     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.024     Document Type: Conference Paper

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