Monolithic two-dimensional arrays of micromachined microstructures for infrared applications

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1679-1686

  Cole, B E ^a   Higashi, R E ^a   Wood, R A ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

Arrays; Bolometers; Emitters; Infrared detectors; Infrared transducers; Microsensors

Indexed keywords

ARRAYS; BOLOMETERS; INFRARED DETECTORS; INTEGRATED CIRCUITS; MICROMACHINING; SEMICONDUCTING SILICON; SENSORS; SILICON WAFERS; SUBSTRATES; TEMPERATURE CONTROL; THERMAL CONDUCTIVITY; TRANSDUCERS;

MICROEMITTER; MICROSENSOR; MICROSTRUCTURE DESIGN; MICROSTRUCTURE FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032137158     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704273     Document Type: Article

References (5)

1. R. A. Wood, B. E. Cole, N. A. Foss, C. J. Han, R. E. Higashi, and R. Lubke, "Monolithic silicon uncooled focal plane development for high density array development program (HIDAD)," in Proc. IRIS DSC, 1990.
2. R. A. Wood, "Monolithic silicon microbolometer arrays," Semi-conductor Semimetals, vol. 47, pp. 43-121, 1997.
3. B. Cole, R. Higashi, J. Ridley, J. Holmes, E. Benser, R. Stockbridge, L. Murrer, L. Jones, and E. Burroughs, "Recent progress in large dynamic resistor arrays," in Proc. SPIE, vol. 3084, 1997, pp. 58-70.
4. T. G. Stratton, B. E. Cole, P. W. Kruse, R. A. Wood, K. Beauchamp, T. F. Wang, B. Johnson, and A. M. Goldman, "High temperature superconducting microbolometer," Appl. Phys. Lett., vol. 57, p. 99, 1990.
5. c superconductor IR sensors," in Proc. IRIS DSC, NASA, Ames IA, Aug. 18-21, 1992.